Design And Preparation Of Liquid Optical Phase Modulator Based On Stacked Piezoelectric Ceramics

The optical integrated aperture imaging system arranges several small aperture optical elements according to a certain regular spatial position,and achieves common phase precision on the same focal plane by adjusting the optical path and matching the phase.0.1?.Stacked piezoelectric ceramics can achieve nanometer-scale displacement control accuracy in the longitudinal direction.In this paper,a piezoelectric ceramic tube is stacked and filled with a transparent liquid medium.A compact optical phase modulator is designed and the output is prepared.Using the interferometer to detect the phase and using the stripe offset marker image processing method,the optical phase detection method with the accuracy of the above phase modulator up to 0.05? is obtained,which provides a feasible reference scheme for the optical synthetic aperture common phase adjustment.The main work of this paper is as follows:1.The research background and research significance of the subject are discussed,and the research progress of optical synthetic aperture imaging technology and piezoelectric ceramic material is investigated.2.A piezoelectric driven liquid optical phase modulator with small volume and high control precision is designed.The phase modulator is driven by a tubular piezoelectric ceramic and is filled with a transparent liquid medium.The ceramic tube is provided with thin glass sheets at both ends,one of which is sealed with adhesive and the other is sealed with a liquid medium and is set as a free end.The length of the transparent liquid in the direction of the transparent liquid can be adjusted with the length of the piezoelectric ceramic,thereby forming a sandwich sandwich structure of "beam input end + optical path adjustable liquid column + beam output end",and the preparation output of the device is realized.3.An optical phase detector phase detection experimental platform was built,including Michelson interferometer,microscopic imaging system,and image processing system.The interferometer is modified into a "cage" structure that can accommodate liquid optical phase modulators.The microscopy system is used to amplify and record the interference fringe image.The stripe offset marking method is used to measure the optical phase(optical path)accuracy from 0.5?.Increased by 10 times.The experimental results show that the optical path adjustment amount with the accuracy of 0.05? is related to the control voltage.