MEMS Inertial Measurement Unit Self-calibration And Application

With the continuous development of MEMS micro-mechanical technology,MEMS inertial devices are increasingly used in military,industrial,medical,and other industries.Modern warfare puts higher demands on the precision of guided weapons.High-precision inertial navigation systems are necessary for improving accuracy.This requires navigation systems to meet the needs by assembling more accurate inertial measurement devices or using integrated navigation.Compared with traditional inertial devices,MEMS inertial devices have received more attention due to their advantages in cost and volume,but their measurement accuracy is still the main bottleneck restricting their application development.In order to improve the application range of MEMS inertial measurement unit,the research on calibration technology of MEMS inertial devices is becoming more and more active.This thesis takes the online self-calibration method of MEMS inertial measurement unit as the main research direction,and mainly studies the basic principle and output error model of MEMS inertial devices.The error model of MEMS inertial device is established.The laboratory calibration method of MEMS gyroscope is designed according to the model equation.The accelerometer is calibrated by gravity field experiment method.The whole machine test method of the MEMS inertial measurement unit with application value.Through the application research of MEMS inertial device,the system scheme of inertial measurement unit composed of MEMS chip is designed.The MEMS device hardware is built by ARM chip,and the gyroscope and accelerometer which are suitable for the overall accuracy are selected.The key technology of MEMS inertial device design.The inertial navigation technology is studied,and the updating method design of the inertia device output to the carrier attitude,speed and position is completed.The quaternion update method is used to update the carrier attitude,and the speed and position update solution is completed.The MEMS-based inertial device is completed.Inertial navigation application research.Based on the research of MEMS inertial measurement unit application,the pre-launch online calibration method of MEMS inertial device is studied.The state equation of the corresponding position is established by the vertical process of the projectile,and the observation result is constructed by the navigation output.The model of the equation of state is simplified,the change of the attitude of the missile during the vertical process is established,and the error equation under the condition of varying attitude angle is established.The simplified model of the online calibration equation is obtained,and the measured value is brought into the model equation and solved.The error source of the inertial measurement unit is distributed by Kalman filter method,and the simulation analysis is carried out according to the simulation experiment data.The simulation results show that the estimation of the zero offset estimation value is achieved within 5s and the convergence effect is achieved.The feasibility of the self-calibration method is verified by simulation.The zero offset estimate of the inertial device can be effectively estimated,and the estimated value is close to the true value and the reference value,realizing the online self-calibration of the MEMS inertial device.