Accuracy Analysis And Error Compensation Of Beam Direction Control System Based On Scanning Galvanometer

Since the advent of laser,beam pointing control technology has been developing rapidly.Laser beam has been applied to every aspect of life because of its good collimating characteristics.As the key technology of beam control,beam pointing control system has also been applied to various fields of industrial manufacturing and scientific research,and has effectively promoted the development of the integrated circuits,aerospace and biology.The accuracy of technology and the quality of products in medical,precision assembly and special machining are constantly improving.Therefore,it is very important to study and further develop the beam pointing control system.The work of this paper is to set up a beam pointing control system based on scanning galvanometer,analyze the errors interference of all parts of the system and correct or eliminate them,so as to ensure the control accuracy of the system as far as possible.The main research contents are as follows:Firstly,the overall scheme of the beam pointing control system is designed according to the research purpose.Combined with the overall framework of the system,the control scheme and the accuracy detection scheme are further designed.According to the design plan,the hardware equipment of each link is selected and connected,and the control and detection part of the system is programmed based on the Labview software.Then,based on the overall plan,the interference factors and sources of error are analyzed.Secondly,the modeling and Simulation of scanning galvanometer and correction of error compensation are carried out.For scanning galvanometer,its mathematical model is established from its basic working principle.From the three aspects of pillow distortion,barrel distortion and installation error,the error phenomena are analyzed theoretically and simulated,and the distortion correction is carried out by combining experimental data with interpolation algorithm.Thirdly,the nonlinear distortion of the photoelectric position sensor is corrected by calibration experiment and compensation algorithm.Design experiments to detect the performance parameters of the sensor.The influence of background light and incident angle on the measurement accuracy of sensors is analyzed,and the error phenomenon is further simulated and verified by experiments,so as to obtain the most ideal experimental measurement environment standard.Finally,the beam pointing control experiment is carried out.Firstly,the control accuracy experiment is carried out to determine the positioning accuracy of the system.For noise interference caused by the working state of the system,noise reduction is carried out from two aspects: wiring and filtering.Then the beam trajectory control experiment is carried out,and the distortion error is compensated by the correction algorithm.The results show that the accuracy of pointing control can be significantly improved by analyzing and correcting all the errors of the system,which has very important application prospects in the fields of laser processing and laser communication.