Error Analysis And Structure Optimization Of Two-dimsional Time Grating Based On Plane Standing Wave Field

With the advancement of the times and the rapid development of science and technology,the technological revolution has also followed the trend of the times and emerged.The progress of science and technology is the most prominent element to measure the comprehensive strength of the country.The development of science and technology complements the people's life of happiness.The development of precision displacement measurement technology is closely related to the development of science and technology.With the development of science and technology,the demand for precision measurement is increasing.It is no longer the demand for one-dimensional measurement but for higher dimensional measurement,such as two-dimensional measurement,three-dimensional measurement and even multi-dimensional measurement.in many fields such as micro-electromechanical systems,precision manufacturing and robot engineering.there are certain requirements for the accuracy of two-dimensional displacement measurement.So far,there are three main ways to measure two-dimensional displacement in various fields:two-dimensional planar micro displacement measurement,two-dimensional capacitance measurement and two-dimensional grating measurement.Time grating displacement sensors use time to measure space have accuracy comparable to gratings,strong anti-interference ability,and low manufacturing cost.At present,it has been gradually and widely used in one-dimensional displacement measurement,and is also involved in the field of two-dimensional displacement measurement.In order to make the two-dimensional time grid measurement technology further,the research group proposed two types of two-dimensional time grids,Plane standing wave magnetic field and Biorthogonal traveling wave magnetic field.In this paper,the Plane standing wave magnetic field two-dimensional time grid error analysis traceability and structure optimization are researched.The main research contents are as follows:1)The measurement principle of two-dimensional time grating is theoretically studied.The construction of planar standing wave magnetic field and the generation mechanism of induced signal are theoretically analyzed and deduced.2)The error caused by the two-dimensional time grating structure is analyzed in detail,including the construction of planar standing wave magnetic field and the error caused by the induction of electrical signals.The harmonic components of the magnetic field strength and the induced signal are obtained by two-dimensional Fourier decomposition,and the structural error of the sensor is determined by combining the displacement calculation method.3)According to the characteristics of two-dimensional time grating output signal,the error introduced by displacement calculation method is analyzed.The standard output signal of the sensor is constructed,and the displacement in two directions is obtained in the displacement calculation method.The error introduced by the solution method can be obtained by performing difference calculation with the theoretical displacement.4)The installation errors introduced by various installation postures of the sensor are analyzed.Simulation and displacement solution are carried out on induction signals in various possible installation states,and corresponding processing is carried out on the data to obtain the influence of different installation states on measurement accuracy and the magnitude of the introduced additional error.5)According to the analysis of sensor errors,trace the main errors and propose error suppression methods.In this way,the sensor structure is optimized to improve the measurement accuracy.The correctness of the error suppression method is verified by numerical simulation and electromagnetic field simulation.6)Processing the sensor object and setting up an experimental platform for experimental research.The stability of two-dimensional time grating is ±2?m measured experimentally.According to the precision testing method,the precision experiments of moving the moving array along three special directions are completed and the original errors in all directions are obtained,and the errors are analyzed.The experimental error analysis results are consistent with the error suppression method,numerical simulation and electromagnetic field simulation results,which verify the correctness of the previous analysis.Secondly,the measurement accuracy of sensors before and after optimization is compared.The results show that through error analysis,error suppression methods and structural optimization,the measurement error of the sensor is found to be reduced by comparing the measurement results.The research of this subject provides theoretical guidance and experimental basis for the development of high-precision two-dimensional time grating.