Research On The Integration Technology Of MEMS Security System

Because of its own advantages,MEMS technology has a very good application prospect in fuze.In order to speed up the practical process of MEMS fuze in China,a MEMS safety system for fuze is designed in this paper,which integrates MEMS security mechanism,control circuit and micro detonation sequence.In this paper,a MEMS security mechanism is designed.The design process of elastic devices in the MEMS security mechanism are determined by optimization design.The dynamics simulation calculation of the MEMS security mechanism is carried out by ADAMS software,and the cutting pin simulation calculation of the security mechanism is carried out by ANSYS software.In this paper,the influence of different shape of MEMS spring on the spring stiffness,displacement and other characteristics is studied,and the mechanical properties of S-type micro surface spring are mainly studied.Applying the pure bending theory of beam,the stress calculation formula of S-type spring is derived,and the finite element model is established and simulated.A micro spring stiffness test platform is built to test the stiffness and stress of S-type micro surface spring.The comparison of theoretical formula,ANSYS simulation results and test data shows that the stress calculation formula corresponds to simulation and test,and the derivation of the formula is reasonable and correct.Among the design parameters of micro surface spring,line width B has the greatest influence on the spring stiffness,and clearance D and cantilever length l have the greatest influence on the spring displacement.With the help of MATLAB software and the requirement of dimension space,the structural dimension of micro face spring can be optimized.The detonation sequence of MEMS safety system is designed,and the powder and initiating device are selected;the control circuit of safety system and the shell of safety system are designed.