Research On Error Compensation Of CMM Based On Kinematics Theory Of Multi-body System

In this paper,based on the kinematics theory of multi-body system,the measurement error of CMM is deeply studied and analyzed.The software error compensation of CMM is completed by modifying the operation instruction.In addition,the problems existing in the conventional model of CMM are studied,and the precise model of CMM is established.Improved the precision of three coordinates measuring instrument error compensation.The main research content is as follows:(1)Through the research and analysis of the kinematics theory of the multi-body system,the matrix transformation relation between the adjacent sequence bodies of the multi-body system is obtained.On this basis,the error compensation model of FXYZ type CMM is established by using the conventional modeling method.(2)The geometric error sources of CMM are introduced in detail,and the measurement principle and general measurement methods of dual-frequency laser interferometer are studied and analyzed.Aiming at the problems of low measurement efficiency and large measurement error of traditional measurement methods,the nine-line error identification method is deeply studied.(3)According to the error compensation model of CMM,design and develop software to compensate the geometric error of CMM.At the same time,the concrete operation instruction correction method is given for several basic movement forms of the measuring head parts.(4)Aiming at the problem that it is difficult to accurately calculate the conventional geometric error model of CMM,a new precision model is proposed on the basis of the conventional geometric error model,and the compensation effect of the new precision model is verified by simulation experiments.