Research On Hysteresis Compensation Control Method Of Piezoelectric Ceramic Drive Platform

The rapid development of science and technology has broadened the research field of human beings.It has become the mainstream from the traditional macro object research to the micro world exploration.In many ultra precision manufacturing,measurement and processing operations,it is necessary to drive the equipment to provide micro nano level step displacement,and also to ensure the system has high dynamic performance.Piezoelectric ceramic drive platform is an ideal driving device for exploring the microscopic field due to its small size,large driving force and ultra-high displacement resolution.However,due to its inherent non-linear factors such as hysteresis,the scanning imaging of the sample is reduced.The positioning accuracy also affects the stability of the system.In order to compensate the hysteresis nonlinearity of the piezoelectric ceramic drive platform and make the platform have good dynamic characteristics,this paper first establishes the Prandtl-Ishlinshii(P-I)hysteresis mathematical model,linear dynamic model of the platform,and a combination of the two.The model was validated by relevant verifications.Then,based on the P-I hysteresis mathematical model,the inverse model of the P-I hysteresis is used as a feedforward controller of the piezoelectric ceramic drive platform to compensate the hysteresis nonlinearity of the platform and verify its effectiveness.At the same time,in order to improve the dynamic performance of the platform,this paper designs a linear active disturbance rejection control method for piezoelectric ceramic drive platforms,and verifies that the method can effectively improve the dynamic performance of the platform and enhance the robustness of the platform.Considering that the compensation effect of the feedforward controller on the platform depends on the accuracy of the model establishment,in order to further compensate the hysteresis and nonlinearity of the platform and improve the dynamic performance of the system,a method is proposed to combine the feedforward controller of the platform with linear auto-disturbance rejection.The combined control method combined with control eliminates the compensation error that the feedforward controller may bring due to the accuracy problem of model establishment through linear auto-disturbance feedback control.Finally,the simulation results show that compared with the feedforward control method based on the P-I hysteresis inverse model and the feedback control method based on the linear auto disturbance rejection control,the proposed composite control method not only compensates the hysteresis nonlinearity of the piezoelectric ceramic driving platform,but also greatly improves the dynamic performance of the platform,making the piezoelectric ceramic driving platform become a real sense Ideal micro displacement driving element.