Research On Design And Control Technology Of The High Precision Parallel Motorized Mirror Frame

The inertial confinement fusion device has a complicated optical path and high shooting accuracy.It has high requirements for each optical element in the host device.The large-diameter mirror is mainly used for collimating guidance of the laser transmission process,and its surface shape accuracy and posture adjustment accuracy directly affect the collimation accuracy of the host device,and its structural stability directly affects the structure drift of the laser target.Therefore,a high-precision parallel electric mirror frame is developed and the surface accuracy,posture adjustment accuracy and stability index of the mirror are studied respectively,which is significant to improve the shooting accuracy of the host device.First,the support method of the large-diameter fused silica glass is researched.Based on domestic and overseas researches on the support method of large-diameter mirrors,two peripheral support schemes are designed,and the surface deformation is analyzed based on the finite element method.The first scheme has high surface accuracy,but its positioning and assembly are relatively complicated,and the number of mirrors is large and needs to be disassembled and cleaned frequently,so this scheme has certain limitations.The second scheme is simple to disassemble and assemble,and its superior level parameters are determined by orthogonal analysis method.In the ideal state,the surface shape accuracy is close to that of the first scheme.In addition,the error of the screw tightening force at the current technological level is analyzed.The influence of the accuracy of the surface shape of the second reflector finally determines the support scheme of the reflector.Second,according to the requirements of the posture adjustment of the mirror,the movement mode of the parallel motorized mirror frame is designed.Based on this,the key parts design and overall structure design of the mirror frame are carried out,and the key parts are checked by the finite element method.The modal analysis and random vibration analysis are carried out on the designed parallel motorized reflector frame to prove the structural stability is meets the design requirements.Third,the kinematics model of the parallel motorized mirror frame is established to resolve its inverse kinematics,obtaining the motion decoupling relationship of the parallel mirror frame.Based on this,the development of the motion control system of the parallel motorized mirror frame is completed.Finally,the motion characteristics test of the micro-drive device and the parallel motorized mirror frame is completed.The test results show that the motion accuracy of the mirror frame in the stable state can reach the expected value.The modal experiment of the parallel motorized mirror frame is completed,and then the modal analysis results are verified.