Research And Implementation Of The Measurement And Control System Of The Low Particle Vacuum Valve Analysis And Verification Platform

Low particle vacuum valve is an indispensable equipment in the production of semiconductor,integrated circuit and photovoltaic module,so it has high quality requirements.The particles falling off during the working process of low particle vacuum valve will cause great economic loss to the product pollution,so the detection of falling off particles in the production of low particle vacuum valve is an essential part of the industry in the future,and the data of falling off particles in the valve will become an important detection index of low particle vacuum valve.At present,the production and detection technology of low particle vacuum valve are monopolized by foreign enterprises,and the research on low particle vacuum valve in China is also in a blank stage.In this paper,a set of low particle vacuum valve analysis and verification platform is designed.Through the electrical control system to simulate the working condition of the low particle vacuum valve in the actual working condition,the particle size detection of the low particle vacuum valve is completed.The details are as follows:(1)Based on the domestic and foreign literature and the manufacturing process of the low particle vacuum valve in this project,the source of the dropped particles in the valve is analyzed to provide reference for the next particle detection scheme design.(2)This paper analyzes the current particle detection technology,aiming at the actual situation and relevant indicators of the particle detection,compares the particle detection scheme,and selects the particle detection scheme suitable for this topic.(3)Based on the particle size detection scheme of light scattering selected in this paper,the overall scheme design of the analysis and verification platform is carried out.It includes the design of vacuum system,control system and upper computer monitoring system.(4)The hardware circuit system design and software system design of low particle vacuum valve analysis and verification platform.The hardware circuit of the measurement and control system with PLC as the control core is designed,and the key components such as molecular pump,dry pump,vacuum sensor and particle counter are selected.Finally,the control circuit connection and data communication are carried out based on the electrical connection characteristics of each peripheral hardware device.At the same time,the PLC is programmed to complete the control and data acquisition of related equipment.The control and state monitoring of the test-bed are realized by LabVIEW host computer.(5)Complete the actual construction of the low particle vacuum valve analysis and verification platform,and debug the hardware circuit and software system of the measurement and control system.Through the wiring and debugging of circuit components and the optimization of software,finally complete a set of low particle vacuum valve analysis and verification platform that can be delivered for use.