Fabrication And Properties Of Energetic Semiconductor Bridge Based On Al/MoO₃ Multilayer Films

Reactive Multilayer Films?RMFs?were prepared by magnetron sputtering,and the properties of the films were systematically characterized.Combustion properties of the films were investigated by combining experimental results and models.The electrical explosion characteristics and ignition capability of the energetic semiconductor bridge?ESCB?integrated with Al/MoO₃-RMFs were studied.The main research contents and conclusions are as follows:Al/MoO₃-RMFs were flat with closely bonded layers with Al peroxided by oxygen loss.When the modulation period got thinner,the reaction initial temperature decreased and the exothermic energy increased.But the exothermic heaty decreased when it was less to 50 nm.Due to the oxygen loss,higher MoO₃ content than stoichiometric ratio increased heat release.The effects of modulation periods and widths on the self-propagating combustion properties of RMFs were investigated by laser ignition.The RMFs with a modulation period of 50 nm¹50 nm had better self-propagating combustion performance.A 1D combustion velocity model based on heat transfer theory was established for combustion process.The calculations were in good agreement with the experiment:when the modulation period was300 nm⁵0 nm,the burning rate was approximately linear with the modulation period;when the modulation period was greater than 300 nm,the burning rate decreased rapidly.Compared with SCB,the critical excitation time of ESCB increased from 7.02?s to13.37?s,the critical excitation energy increased from 1.71 mJ to 4.34 mJ,the electric explosion flame of Al/MoO₃ ESCB increased obviously,and the duration of electric explosion increased from 100?s to 600?s.For ESCB,the critical excitation time could be shortened and the critical excitation energy can be reduced by controlling the modulation period and the modulation ratio.The ignition performance of ESCB was better than SCB because BPN propellant could be ignited successfully.The ESCB-50 nm reliably ignited BPN grain with spacer distance of1 mm.The ignition sensitivity of BPN propellant grain to ESCB at 1 mm spacer distance was tested by the Neyer-D optimalsensitivity test method.