Research Of Optical Fiber Pressure Sensor Based On MEMS

The MEMS Fabry-Perot sensor is gradually favored by people because of its advantages of simple structre,small size,anti-electromagnetic interference,low temperature coefficient and high sensitivity.In addition to the above advantages,MEMS-based fiber Fabry-Perot sensors also have good characteristics such as good linearity,high measurement accuracy,and large dynamic range.Therefore,it can better face a variety of harsh environments and has a wide range of application prospects in fields such as petrochemicals,water conservancy,and electricity.In this paper,a new type of MEMS optical fiber pressure sensor is designed and fabricated.A mathematical geometric model of the sensor's sensitive film is created and its working principle is studied.The deflection of the sensitive film under the force to be measured causes the horizontal displacement of the displacement column and changes the cavity length of the Fabry-Perot cavity.The state of the deformation of the sensitive film after being exposed to pressure and the effect of its film thickness and radius on the deflection of the pressure sensitive film are discussed.The finite element software ANSYS was used to establish the sensor model to simulate the mechanical properties of the sensor's sensor.Several parameters affecting its performance were analyzed and the parameters were discussed.The processing technology of the MEMS-based optical fiber pressure sensor is studied.The process steps are determined based on the technological level.The sensor is manufactured and an experimental system is set up to test the performance of the sensor.The phase demodulation method based on Fourier transform demodulates the sensor and analyzes the stress test results.In the range of 0-0.1MPa,the linearity of the sensor reaches 0.02264%%,and the sensitivity reaches 264.91nm/MPa.The pressure demodulation analysis system was developed based on Lab VIEW,and the interface design of the system was completed.Based on the above-mentioned demodulation method,the system was further optimized and the background programming of the system was completed.During the experimental test phase,the system was used to complete the demodulation and analysis of the sensor.