| With the rapid development of the new generation of information technology represented by the big data,Internet of things and cloud computing,lead to a new round of reform opportunities for all walks of life.Especially the manufacturing industry,which is the important pillar of the national economy.With the concept of Industry 4.0 and Made in China 2025,the traditional manufacturing industry has been transformed,is heading towards the direction of intellectualization,digitalization,networking,automation and greening.Under the "Internet plus" background,the Internet of Machines has been rising rapidly in order to improve the production efficiency,the level of equipment automation and the level of equipment management.As a typical capitalintensive and technology-intensive industry,semiconductor manufacturing enterprises have a large investment in equipment,and their updating and maintenance costs are also high.Products diversification,manufacturing process complication,high precision of manufacturing equipment and big data from production information has brought new challenges into the semiconductor industry.Therefore,fully excavating the production efficiency of the equipment is the key method to reduce the enterprise cost and improve its market competitiveness.Based on the theory research of Overall Equipment Efficiency and Internet of Machines,analyzed the important meaning of OEE in Equipment management.Take the Wuxi factory of IF company as the research object and analyze its requirements for the OEE system.Based on the Internet of Machines and related technologies,established the OEE system from four aspects: business process,implementation structure,function module and database.The OEE system include three functions: automatic information collection,intelligent information processing and digital information computing.Finally,the OEE results will presented to users by the reports from different dimensions,and will show the reason of equipment efficiency loss,can maximize the overall equipment efficiency by the real-time monitoring of the production status of the equipment and continuously tracks the efficiency loss of the equipment.Through the application and effect analysis of IF company,the expected goal of the system is achieved.The research results of this paper provide an effective method for improving the equipment efficiency of semiconductor manufacturing enterprises.Proven,the digital OEE system has greatly improved the equipment management level of the enterprise,which lead to equipment production process visualization,equipment maintenance management standardization and enterprise production process lean.This system reduces the labor intensity of the operator and the maintenance cost of the equipment,and offered a certain reference for improving the equipment information management of semiconductor enterprises. |