Analysis Of Key Parameters And Structural Optimization Of Air Floating Contactless Transport Platform

In recent years,with the rapid development of science and technology,and the proportion of electronic information technology industry in the world economy is increasing.The electronic information industry has gradually become the pillar of the national economy industry.As a result,the key semiconductor technology in the electronic industry is becoming more and more important,which makes the processing accuracy requirements of semiconductor wafers,glass substrates and other components more and more stringent.However,semiconductor materials themselves are fragile and fragile,so the safe and non-destructive transmission of semiconductor materials has become an important part of production and manufacturing.Traditional handling technology will touch the surface of semiconductor wafer,which can easily cause damage to the product and restrict the high precision requirements of the product.Therefore,non-contact transport has gradually become the current alternative mode,and air-floating transport technology has gradually become the mainstream in the field of non-contact transport due to its advantages of clean,non-polluting,non-heating,non-magnetic,very small impact on the surface of objects.At present,the current non-contact mode of transport has some limitations,such as stress concentration,unstable transportation and great waste.In order to analyze the key parameters and optimize the structure of the non-contact platform based on gas viscous force,this paper systematically and thoroughly studies the transport characteristics of the platform by means of the combination of principle introduction,simulation analysis and comparison,mathematical modeling,algorithm optimization and experimental verification.The main contents of this topic are as follows:1.Designing the air-floated transport platform and introducing the working principle of the horizontal drive object of the air-floated transport platform.The internal flow field of the air-bearing platform is partitioned by using mesh generation software.The relevant factors affecting the pressure of the air model are analyzed by using Fluent simulation calculation,which verifies the accuracy of the established model of the air-bearing platform.2.Mathematical modeling of the air-bearing conveying platform is carried out,and the data obtained from the mathematical modeling and simulation analysis are analyzed and compared to verify the feasibility of mathematical modeling instead of simulation.It does not provide a theoretical basis for the next stage of experimental verification.3.Gas film pressure distribution measurement and viscous force measurement experiments were carried out on the machined guide platform.By comparing and analyzing the experimental results with the simulation results of Fluent,the rationality of the design of the air-bearing platform is verified.4.Through mathematical modeling and simulation analysis,the key parameters affecting the horizontal driving force of the air-bearing platform are extracted.Multi-objective optimization of various influencing factors is carried out by genetic algorithm.According to the final optimization results,combined with the actual situation,the air floating transport platform was redesigned,and the test was built.Compared with the previous design platform,the feasibility of the design results was analyzed through comparison and verification.