A Squeeze-Film Damping Model For The Normal Structure Rectangle Torsion Microresonators

With the increasing application of MEMS resonators,the industry has also put forward higher requirements for the design and manufacture of the device.Due to the small size of the MEMS resonator,squeeze film damping has a great influence on the working characteristics of MEMS devices.Therefore,how to predict the squeeze film damping of gas in the design stage accurately to improve the quality factor of the micro-resonator becomes a key factor.In the study of the squeeze film damping of MEMS resonators,such researches only consider the case where the torsion axis of the rectangular plate torsional resonator on the central axis of the rectangular plate or on a certain boundary of the rectangular plate,but lack of a general theoretical model to describe the squeeze film damping of the device when the torsion axis is in a different position.It can also be found by consulting the current data that a general theoretical model for both perforated and imperforated states has not yet been proposed.Therefore,the research model of the rectangular plate torsion micro-resonator needs to be improved.Based on previous researches,this dissertation studies the squeeze film damping of the MEMS rigid imperforated and perforated rectangular plate with arbitrary torsion axis by defining a variable Using the double sine series method to solve the modified Reynolds equation of interstitial gas,the analytical model of squeeze film damping of two structures can be obtained.And specific derivation process of damping constants,stiffness constants and quality factor can also be gotten.At the same time,the motion and structural parameters of the rectangular plate are given in this paper.The accuracy of the analytical model is verified by comparing the theoretical solution obtained from MATLAB with ANSYS simulation results.The effects of different motion states and structural states on the damping of the system's extrusion membrane are discussed.