| With the rapid development of flexible electronic devices in recent years,the research on flexible temperature sensors has gradually deepened.Flexible temperature sensors have the characteristics of easy deformation and softness,and are widely used in sports,medical health monitoring,fire protection,aerospace,communications and other fields.Based on this,this subject uses organic material graphene and metal material platinum as different sensitive materials,and adopts different process technologies to prepare flexible temperature sensors of different structural sizes,Research and test and optimize its linearity and sensitivity,stability,repeatability and hysteresis,resolution,response time,other interference and other performance indicators,The main research contents are as follows:1.Research and preparation of graphene flexible temperature sensor: using graphene conductive paste as sensitive material and polyimide as flexible substrate,using screen printing process technology,the temperature of different screen printing meshes and different design patterns was prepared sensitive film,through characterization and test analysis,the graphene flexible temperature sensor prepared in this subject has high stability,repeatability and hysteresis also gradually stabilized with the increase of the number of cycle tests,the linearity is 0.971,resolution is at least0.5 ℃,and it is not affected by the interference of bending deformation,but it is affected by humidity,so it needs to be protected by packaging for use as a temperature sensor..2.Preparation research of metal platinum flexible temperature sensor: using platinum metal as the sensitive material and polyimide as the flexible substrate,combined with photolithography and magnetron sputtering process to prepare different patterns(circular spiral,square spiral and serpentine)and the metal platinum flexible temperature sensors with different line widths are compared with the metal platinum temperature sensor based on ceramics.Further optimize the design of the sensor structure according to the test results,reduce the size of the sensor's sensitive unit and the line width of the graphic,and increase the thickness of the sensitive film,the finally prepared metal platinum flexible temperature sensor and the metal platinum based ceramic Compared with temperature sensors,it also has excellent linearity andsensitivity,its linearity can reach 0.9997,resolution is at least 0.5 ℃,and it has high stability and repeatability.The hysteresis is only 0.28%,and it can respond quickly.The response time is only 514 ms.Have a certain ability to resist bending. |