Research On Analysis Methods Of Measurement Uncertainty Of Surface Acoustic Wave Micro-Pressure Sensor

Pressure is one of the most basic industrial parameters,which is of great significance for ensuring industrial safety in production and creating economic value.With the development of industrial technology,pressure sensors have widely been used in various parts of manufacturing fields,such as industry,consumer electronics,medical electronics and civil aviation.The sensors mainly measure the magnitude of surface force,the acceleration of objects,and the magnitude of hydraulic pressure in complex environments.The accuracy of pressure measurement is the core index of the sensor.Studying the pressure sensor can optimize its performance and increase its value in use.In the process of carrying out an engineering project,all links involve measurement work and pressure measurement is an important measurement item in engineering.In measurement and control engineering,the sensor is the core support.Its performance determines the accuracy of the measurement and the credibility of the measurement result of the sensor is of vital importance.Therefore,in this paper,a surface acoustic wave(SAW)micro-pressure sensor was used as the measurement research object.The uncertainty evaluation of the measurement results of the surface acoustic wave micro-pressure sensor was carried out,which is of great significance to improve the accuracy and reliability of measurement data.First of all,this paper focused on the structure and working principle of SAW micro-pressure sensors,and studied the basic theory of measurement uncertainty,the source of measurement uncertainty and evaluation methods.In addition,the paper focused on the measurement mechanism of SAW micro-pressure sensors.Based on the measurement methods,conditions,and equipment of the sensor,the measurement uncertainty analysis method was studied and the characteristics and applicable conditions of different measurement methods were summarized.Secondly,based on the research on the basic characteristics,performance parameters,uncertainty component distribution and data processing of the sensor,the paper establisheda linear regression model between the input parameters and the output parameters of the SAW micro-pressure sensor and a measurement uncertainty model.The surface acoustic wave micro-pressure sensor was used as the measurement object to complete the measurement of the sensor and obtained the measurement data.Using the principle of least squares as the theoretical basis,the paper solved a linear regression model and obtained a curve fitting diagram of input-output parameters of a surface acoustic wave micro-pressure sensor.Finally,the uncertainty evaluation of the SAW micro-pressure sensor was studied.Establish the measurement uncertainty model of the sensor,determine the source of measurement uncertainty of the surface acoustic wave micro-pressure sensor through simulation analysis.This paper calculated the measurement uncertainty component of the surface acoustic wave micro-pressure sensor and used GUM(Guide to the Expression of Uncertainty in Measurement)and Monte Carlo Method(MCM)for uncertainty evaluation.To obtain a more reliable and accurate inclusion interval,compare the MCM evaluation results with the GUM evaluation results.