Research On The Motion Mechanism For Laser Parameter Measurement Under Vacuum Environment And Its Influence On Beam Quality

The linear motion platform is an actuator for carrying or positioning a load.It is a brand-new mechanical structure that realizes motion and precise positioning,and also realizes modular design and integrated functions.The platform system integrates the previous guidance system,transmission system,and drive system to make the entire device more concise,thereby effectively reducing the movement error and making the overall device operation more stable.At the same time,in the laser parameter comprehensive diagnosis optical path,a linear motion device is required as an optical path adjustment mechanism,which carries various optical elements,installs preset rules,and allows the optical elements to enter and exit the optical path to realize measurement and diagnosis of laser parameters.In this paper,according to the special requirements of the laser parameter measuring mechanism,the linear motion platform is re-optimized so that the linear motion platform meets the requirements for use in the laser parameter diagnosis device.First of all,considering the strict requirements for precision of the laser parameter diagnosis device,a comprehensive analysis of a variety of errors in the precision optical mechanical design should be made from the view of optical system design and integrated analysis.So as to do a good job for the design of the theoretical basis for the later period.Secondly,combining the design requirements of the mechanism and the principle of friction transmission and anti-backlash gears,the transmission components of the translation stage are designed.The drive unit selects the rotary ultrasonic motor according to the requirements of the used environment.Next,a real-time maintenance device was designed to provide a standard light source in order to detect the improvement of the optical path beam quality of the designed linear motion platform.Through the change of the quality of the detected light beam and the working state of the optical path,the optimization degree of the linear motion platform can be evaluated.Finally,use the beam quality analyzer to measure the M2 factor to detect the quality of the laser beam.According to the change of beam quality,the optimization of the linear motion platform was introduced.