Phase-shift Interference Micro-surface Measurement Technology Research And GUI Implementation

With the progress of product surface quality requirements increase and microfabrication technology,the micro-surface topography measurement technology put forward higher requirements,and due to the non-contact optical measurement method,high precision,the audience can be measured and so on,more and more attention by researchers.This paper based on the phase shifting interferometry to achieve micro microscopic surface topography measurement theory,using an improved method of calculation of the phase shift,resolved when the measurement surface is not ideal plane,when interference fringes are not parallel and evenly spaced linear cluster,and then calculated using fast fourier transform phase shift problems,and using the obtained amount of phase shift for topography measurements.The method requires(PZT)to get an interference pattern between the phase shift to the phase shift introduced simply by changing the position of the object by adjusting the microscope fine focus knob to move up and down the stage.At the same time,this paper used BP212 and SU-8,after many experiments to explore the microstructure process,making the cantilever structure,the cantilever structure as a test plane,shoot more interferograms is calculated using the phase shift method in this paper,the results of the phase shift calculation is analyzed and compared with Kong-Kim iterative algorithm phase shift calculation results are compared with the calculated phase shift existing four-step law or conduct a five-step method of measuring the topography.In experiments measuring the topography,the paper calculated phase shift method not only reduces equipment costs,improved ease of phase shift calculation,and quick method to calculate the speed,high accuracy,with a high value,suitable for topography measurements.Meanwhile,the paper also provided with MATLAB graphical user interface for the platform,designed and developed the graphical user interface,on the interface calculated the phase shift,using the four-step to realize the topography measurement and the topography measurement method of Kong-Kim,making the topography measurement results visualization.In this paper,the design of the test system,the logical structure is more reasonable,friendly interface,simple operation,allows users to easily implement interactive interface,with better usability.