| Over the past few years, research efforts related to nanowire fabrication have grown drastically due to potential applications in the fields of Sensors, Nanoelectronics, and CMOS technology. Due to their smaller dimensions, high sensitivity, high surface area, and low power consumption, nanowires are being widely investigated for identification of biohazards and also for biosensing applications.; In this work we have developed neural probes, microelectrode arrays and gas sensors, integrated with vertically aligned nanowires (VANW) grown on silicon and flexible polyimide substrates. These devices can be used for real-time monitoring and detection of biohazards as well as for various biomedical applications, including patch type and implantable sensors.; For biohazard's sensing applications, a tin oxide (Sn02) thin film was coated on the surface of nanowires to utilize the high surface area density of the nanostructured platform. Crystalline structure and the sensing characteristics of tin oxide after annealing process were investigated with X-ray diffraction (XRD) and resistance monitoring at different concentrations of isopropyl alcohol at part per million (ppm). These devices were fabricated using CMSO technology. |
