| Although polymeric materials have the potential to play an increasing role in the nanotechnology revolution, for these products to become a commercial reality, a deeper understanding must be developed of how to create high-volume, low-cost processing solutions. This work investigated the relationship between polymer type, tooling geometry, processing conditions, and anti-stiction coatings on the ability to injection mold polymer nanofeatures. It was determined that pattern geometry was not as important as feature size for replication and that thermoplastic polyurethanes (TPUs) exhibited enhanced replication quality. The TPUs were able to replicate conical patterns that tapered from 1200 to 300 nm over distance of 4000 nm. Melt temperature was limited by polymer degradation, but increasing mold temperatures provided better replication. Very high mold temperatures, however, did not improve replication and were detrimental to cycle time. Anti-stiction coatings significantly lowered the surface tension on the tooling, thereby reducing adhesion during part ejection. |
