| Scope and method of study. Surface machining of borosilicate glass experiments were conducted such that the cracks formed on the periphery of the machined surface are minimal. Also, several geometries used in MEMS applications on glass and polymers were fabricated.; Findings and conclusions. The machined surfaces and the surfaces formed are examined using optical and laser interference microscopes (MicroXam). It can be concluded that the resultant surface on borosilicate glass could either be a built up or ablated surface. The type of surface observed depends mainly on the input energy provided from the excimer laser. Various other factors that effect the material built up are the mask, media and the number of loops. Good material built-up, on the order of 25 to 35 nm was obtained for 1 mm mask when tests were conducted in air, distilled water, and methanol. Thus by controlling of various parameters, material built up of uniform height was obtained. It is also found that borosilicate glass results in fewer number of cracks when machining under polymer compared to machining in air, or under water. Thus it can be concluded that good surface finish with minimal number of cracks can be obtained in micromachining under polymers. (Abstract shortened by UMI.)... |
