Microcantilever sensor using second order sliding mode control

The mass sensor based on a microcantilever is considered. The mass loading on a sensor-microcantilever is estimated by aligning a position of the sensor microcantilever with a reference one using second order sliding mode control. The control function acting on the sensor-microcantilever contains information about the loading mass. The problem is reduced to a second order sliding, in particular super-twisting, control design and time-varying parameter estimation/identification based on this control. The algebraic approach is also developed to estimate mass loaded on a sensor-microcantilever, which is effected by a harmonic excitation function. This approach is based on the analysis of steady state responses of a reference and sensor-microcantilevers. The numerical example illustrates the effectiveness of the loading mass estimation based on second order sliding mode control (SOSM) algorithm and the algebraic approach.