Study On The Fabrication And Application Of Optical Epsilon Near Zero And Hyperbolic Metamaterials

Optical metamaterials are a new type of artificial materials with unique optical properties that are different from general natural materials.Its special properties often do not depend on the properties of its constituent materials,but on its special structural design.Among them,hyperbolic metamaterials have attracted the attention of researchers due to their unique optoelectronic properties,and have been widely used in the design and manufacture of micro-nano optical devices.According to different application scenarios,the requirements for micro-nano optical devices are also diverse,so it is necessary to design hyperbolic metamaterials with different hyperbolic corresponding wavebands according to needs.Traditional natural materials have many limitations in the design and preparation of hyperbolic metamaterials due to their inherent properties,so the research on basic materials is still indispensable.Indium tin oxide(ITO)is an artificial transparent conductive oxide formed by doping In2O3 and Sn O2 in a certain proportion.It has the characteristics of positive or negative dielectric constant and low loss in the near infrared region.At the same time,its band gap can also be adjusted by changing the doping ratio and the amount of oxygen when preparing the film.These characteristics of ITO film make it a good substitute for the metal layer in the design of hyperbolic metamaterials.Although there have been a large number of literatures on the performance of ITO thin films,there are few reports on the use of it as a substitute for the metal layer in the multilayer film system,and there are few reports on the analysis and control of its dielectric constant characteristics.In order to make better use of the dielectric constant characteristics of the ITO film,an ITO film with an ideal dielectric constant is prepared for more complex structural design and manufacturing,it is necessary to explore the influence of ITO film preparation process on the properties of ITO film.At present,most of the hyperbolic metamaterials with micro-nano multilayer film structure adopt the method of single metal-dielectric layer superposition to form the hyperbolic metamaterial,but they can only realize the hyperbolic effect under the condition of p-polarization.The use of high refractive index dielectric materials and the use of hyperbolic materials with a medium-metal-medium structure can achieve hyperbolic effects on both p-polarization and s-polarization conditions.Using hyperbolic metamaterials and media to construct a one-dimensional photonic crystal can realize a one-dimensional photonic crystal without dispersion under both p-polarization and s-polarization conditions.The first chapter of this article background of the thesis described in also introduces the status quo of the design of optical metamaterials and related research.The preparation methods and related theories of optical metamaterials are briefly described.State the research purpose of this article.The second chapter of this article introduces the preparation and measurement equipment used in the sample preparation and characterization in this article,and briefly introduces the working principles and parameters of each equipment.An experiment to verify the phenomenon of negative refraction is introduced.The thirdly chapter of this article mainly discusses the effects of oxygenation,substrate heating temperature and post-annealing temperature on the dielectric constant transmittance and square resistivity of ITO films.ITO films are prepared by ion beam sputtering,and ellipsometer is used to After the sample is measured,the dielectric constant of the sample is obtained by fitting for analysis.And explored the influence of changing the amount of oxygen on the dielectric constant and transmittance reflectivity of the Si OX film.The fourth chapter of this paper mainly introduces the design research and preparation of two artificial hyperbolic metamaterials.And through experimental experience,pointed out the possible problems in the sample preparation process,and proposed the method of optimization of the preparation process.Introduce the design principle of one-dimensional achromatic dispersion photonic crystal,and use the hyperbolic metamaterial designed in Chapter 4 to design and prepare a one-dimensional photonic crystal without dispersion under the conditions of TM polarization and TE polarization.It was characterized and data analyzed.The fifth chapter of this article summarizes the work in this article,and looks forward to the development of optical metamaterials and optical devices.