Research On Broadband And Highefficiency Graphene Optical Switch Array

In recent years,high-integration,low-power,low-loss optoelectronic devices have become the research focus of silicon-based photonics.Optical switches on the SiliconOn-Insulator(SOI)platform have the advantages of small size and low power consumption.The most important thing is that optical switches based on silicon materials can be combined with complementary metal oxide semiconductors(CMOS)manufacturing process compatible.The waveguide type optical switch has the characteristics of high integration and small size,and it is one of the important components in the photonic integrated circuit.Thermo-optical switches have become the focus of research in recent years due to their advantages of good stability and low power consumption.Graphene materials have excellent mechanical,thermal and optical properties,and the excellent properties of graphene can effectively improve the performance of thermo-optical switches.Graphene-based thermo-optical switches can effectively reduce the size of devices and solve the current low integration problem of silicon photonic chips due to the large size of optoelectronic devices.As the demand for bandwidth in communications continues to increase,thermo-optic switches are important components of integrated circuits,and bandwidth expansion is also critical.In order to meet the requirements of small size and wide bandwidth of optical switches,this article has launched the research of graphene-based broadband optical switches.In order to meet the current requirements for the small size and wide bandwidth of thermo-optical switches,this article has carried out research on broadband graphene optical switch arrays.In order to realize the broadband graphene thermo-optic switch array,we first proposed a Mach-Zehnder Interferometer(MZI)thermo-optic switch in the2-?m waveband.It mainly completed the design of the component unit,the preparation and testing of the device,and proved that the thermo-optic switch in the 2-?m waveband is achievable.Then,an ultra-broadband optical power beam splitter that can work in the1.55-?m and 2-?m wavebands is designed.The beam splitter is mainly composed of subwavelength grating and tapered waveguide.After the design of the ultra-broadband beam splitter was completed,we prepared samples and tested its performance.The test results showed that the device performance of the ultra-broadband beam splitter was basically the same as the simulation effect.The realization of the ultra-broadband beam splitter satisfies the basic requirements of preparing ultra-broadband thermo-optic switches.The graphene-based thermo-optical switches that have been reported so far are composed of a single MZI.In this paper,graphene-based thermo-optical switch arrays are designed and prepared.The research content includes the optimization of graphene wet transfer,the design of optical switch chips,and the preparation and testing of graphenebased thermo-optical switches.The design and preparation of graphene-based thermooptical switch arrays laid the foundation for the design of large-scale graphene-based thermo-optical switch arrays.Compared with the thermo-optic switches that have been reported so far,the broadband graphene optical switch shown in this article not only effectively expands the working bandwidth of the optical switch,but also has a significantly reduced size compared with the traditional thermo-optic switch.The broadband graphene optical switch array has excellent performance and is of great application value in optical communication systems.