| Turbulence is a common physical phenomenon in the atmosphere,ocean,land and universe.Ocean turbulence mixing is an important driving force for ocean heat,momentum and energy transfer.The study of ocean turbulence has important practical significance for marine climate prediction,deep-sea circulation prediction,tide prediction and marine ecological protection.In order to solve the problems of low sensitivity,high cost and difficulty in obtaining turbulence vector information of current turbulence sensor,a lollipop-shaped cilia turbulence sensor based on MEMS technology is proposed for the measurement of marine turbulence,the working principle and measuring principle of MEMS cilia turbulence sensor are introduced,and a lollipop-shaped cilia turbulence sensor based on MEMS technology is optimized and fabricated.The performance of the sample sensor is characterized and tested.The specific work includes several items:(1)A two-dimensional turbulence vector observation model of MEMS cilia turbulence sensor is established,and the functional relations between turbulent shear velocity and fluctuating pressure in flow field,turbulent fluctuating pressure and voltage output of sensor are derived respectively.The measuring principle of turbulence sensor with cilia-cross beam structure is described in detail.(2)The fluid-solid coupling model of cilia-cross beam is established,and the sensor structure is optimized on the premise of ensuring the frequency response bandwidth,so that its sensitivity is effectively improved.Finally,the parameters of the lollipop-shaped cilia-cross beam structure is determined.(3)The layout of the sensor chip is designed,and the sample chip is prepared by MEMS process.MEMS manufacturing technology can realize the mass production of sensors and ensure the consistency of the chip structure.The sensor chip is packaged in a series of marine environment adaptability,such as waterproof,anti-corrosion,pressure resistance and so on.Finally,the lollipop-shaped cilia-cross beam turbulence sensor sample based on MEMS technology was obtained.(4)The sensitivity calibration and vector test of the sample sensor based on the turbulence test platform,the results show that the sensitivity of the sensor is 2.73×10-2 Vms~2/kg and has the ability of two-dimensional vector turbulence detection.At the same time,a series of performance characterization tests are carried out for the deep-sea environment,such as pressure,temperature,flow impact and so on.The experimental results show that the lollipop-shaped cilia turbulence sensor can meet the testing needs of the complex marine environment. |
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