Study On Soft Electronics Processing Based On Water-soluble Mask Transfer And Liquid Metal Nano-particles

The manufacturing process of stretchable/epidermal electronics based on liquid metals has been fully developed in recent years.In order to fully demonstrate the potential and advantages of epidermal electronics,high integration,high flexibility,and high compliance have always been its development direction.Mask deposition technology is a low-cost parallel process technology with industrialization potential and good commercial value.Liquid metal deposition technology based on this technology has been fully developed,but still faces many challenges.When the integration requirements are high and the pattern resolution of tens of micrometers is required,because of the high surface tension of the liquid metal itself and the randomness and chaos of the atomization process,the process yield and repeatability are at a lower level.In this thesis,a manufacturing processing of soft electronic based on water-soluble mask transfer and liquid metal nano-particles is proposed.By this manufacturing processing,the resolution of liquid metal patterning can be stable and efficient improved to 25?m.The water-soluble PVA film is patterned by laser,and then transferred with semi-cured PDMS,so that the mask cross section is inverted into an inverse mesa-shaped trapezoid.The ink based on liquid metal nano-particles is created by sonication of liquid metal in ethanol.With this ink,the negative effect of random chaotic spraying is reduced,and the spraying become more even.By combining laser patterning of a water-soluble mask and atomized spray deposition of liquid metal nano-particles ink,the blocking of mask pattern is effectively eliminated when it comes to tens of microns,leading to the higher resolution of liquid metal patterning.Finally,a series of soft electronic devices are designed and manufactured with this new technique,including epidermal strain sensors that can be used to monitor finger movements,joint skin extension movements,specific temperature-controlled epidermal electronics for drosophila.The manufacturing processing of soft electronic based on the reconnection of liquid metal nano-particles can efficiently and stably process high-resolution liquid metal patterns,which is of great significance for the realization of refined and automated production of soft electronics.