Study On The Preparation Process And Properties Of Tungsten Titanium Alloy

For its good corrosion resistance and oxidation resistance,good electrical and thermal conductivity,W-Ti alloy are often used as the diffusion barrier layer of semiconductor in thin film materials.W-Ti alloy barrier layer is mainly composed of W-Ti alloy target sputtering,the performance of target is very important in practical application,and its performance is mainly determined by the alloy fabrication process.However,the research on the fabrication process of W-Ti alloy in China started later than other countries,it has become a hot research field at present.This paper regards W powder,Ti powder and TiH₂ powder as raw materials and W-10%Ti as the research system,adopts mechanical milling and vacuum hot pressing sintering method to produce W-Ti alloy and its fabrication process.By using X-ray diffraction(XRD),scanning electron microscopy(SEM),the structure and density and hardness of alloy are analyzed,including the relationship between structure and properties.This paper initially studies the milling process of W-Ti mixed powder and the influence of sintering temperature and pressure on structure and properties of the alloy.The results show that:(1)The feature of mixed powder is greatly influenced by the ball milling process.The powder was refined and the solid solution was changed by using the high energy ball milling.But by using the common ball milling,the solid solution of W-Ti is not occurred,and the characteristics of the original powder is not changed.(2)Under the same sintering conditions(1500?,20MPa,1h),different ball-milling processes produce the different structure of alloy.That is to say,the grain size of the alloy produced by high energy ball-milling method is fine and the structure is dispersed and uniform;the structure of alloy produced by the hot pressing of the common milling method is organized irregularly,and the layered segregation is organized in the rich Ti zone.(3)The sintering temperature and pressure have a great influence on the structure properties of the alloys.With the increase of the sintering temperature,the density of the alloy increases gradually,which produced by the mixed powder hot pressing of common milling process.At 1500?,the maximum was 14.18g/cm³;The hardness increased at first and then decreased,At 1400?,the maximum was 625HV.The pressure increased from 20MPa to 30MPa,the density of the alloys increases slightly,but the solid solubility of alloy and the hardness has little changes.