Research On Geometric Error Measurement Technology Based On Combination Target

Manufacturing industry is the foundation of a strong and rich country.Advanced manufacturing technology is listed in the national science and technology development plan as a cutting-edge technology.In the field of advanced manufacturing,it has been a research hotspot in the academic field to use the multi degree of freedom error detection and compensation technology to maintain or improve the operation accuracy of large-scale precision equipment.In recent years,multi degree of freedom error detection of guideway based on optical free-form surface has become a popular trend,but this detection system is only suitable for micro and small multi axis motion system.It is weak for large range multi axis motion system such as numerical control machine tool.Therefore,it is necessary to carry out in-depth research and exploration,in order to find a more suitable optical free-form surface shape and a more suitable method for the linear axis motion error detection in a larger space.In this paper,the rotating paraboloid and flat surface are combined to make a combined target.The two-dimensional displacement measurement technology on a single combined target and the detection technology of the translational geometric error of the linear guideway based on the combined target array are studied.The main work is as follows:1.A displacement measurement system based on the combined target array is developed,which can not only realize the linear measurement of two-dimensional small displacement,but also realize the discrete accurate measurement of two-dimensional displacement of a large range,which is suitable for the measurement of translational geometric error of general linear motion guide rail.2.Completed the development and improvement of the measurement system.In the hardware part,one is to optimize the research work of the design,processing,detection and simulation analysis of the combined target,and the other is to improve the optical path structure of the optical angle sensor.In the software part,MATLAB software is used to process the spot image received by the upper computer and locate the center of the spot image.3.The two-dimensional displacement measurement on a single combined target and the translation error measurement experiment based on the combined target array are completed.The linear measurement of two-dimensional small displacement can be realized by using a single combined target,which has good stability(± 0.05 ?m),accuracy(± 0.3 ?m)and repeatability(± 0.18 ?m).The related factors that affect the sensitivity and accuracy of the measurement system are analyzed and verified by experiments,which provides theoretical support for the subsequent measurement applications.In view of the difference of four degrees of freedom position and attitude of the combined target array,step by step calibration method of the combined target array using geometric relationship and angle information is proposed and verified by experiments.In order to expand the range of displacement measurement method based on the combined target,the translation geometry error measurement method based on the combined target array is derived,and the accuracy of the measurement system is verified by experiments,including positioning error(± 2 ?m)and straightness error(± 1 ?m).