Research On Chemical Mechanical Polishing Process Of 316L Stainless Steel

Flexible organic light emitting display(OLED)has been widely used in various industries due to its excellent characteristics and has become a research hotspot.Stainless steel has high temperature resistance,corrosion resistance,etc.,and is expected to become the main material of flexible OLED substrates.However,the surface quality of stainless steel substrates is required to be high,so it is particularly important to obtain a high-quality stainless steel surface.According to research,chemical mechanical polishing technology can effectively improve the surface quality of stainless steel to meet the requirements of flexible OLED substrates.In this paper,single factor experiments are used to study the influence of abrasive particle concentration,pH value,H₂O₂ concentration,complexing agent concentration and corrosion inhibitor concentration on the effect of 316L stainless steel chemical mechanical polishing.Studies have found that the increase in abrasive particle concentration will improve the polishing rate and quality of stainless steel,but too high SiO₂ concentration will increase the surface roughness of stainless steel.Al₂O₃ can achieve a higher material removal rate,but the surface quality of stainless steel after polishing Poor.The increase of pH value will reduce the removal rate of stainless steel,too high or too low pH value will increase the surface roughness of stainless steel.With the increase of H₂O₂ concentration,glycine concentration,oxalic acid concentration and citric acid concentration,the material removal rate of stainless steel first increases and then decreases,and the surface roughness first decreases and then increases.The material removal rate of stainless steel after adding citric acid is lower than without complexing agent With the increase of the concentration of 1,2,4-triazole(TAZ)and benzotriazole(BTA),the material removal rate of stainless steel continues to decrease,and the material removal rate corresponding to TAZ is higher than that of BTA.The addition of TAZ or BTA improves the surface quality of stainless steel.316L stainless steel has a better polishing effect under the polishing parameters of SiO₂ concentration of 8 wt%,pH of 4,H₂O₂ concentration of 0.050wt%,glycine concentration of 0.2 wt%,and TAZ concentration of 4 m M.The effect of polishing process parameters on the chemical mechanical polishing effect of316L stainless steel was studied through single-factor experiments.The experimental results show that under the process parameters of a polishing pressure of 2.0 kg(4.02 psi),a polishing disk speed of 80 rpm,and a polishing fluid flow rate of 60 m L·min^-1,316L stainless steel has a better polishing effect.The effects of pH value,H₂O₂ concentration,complexing agent concentration and corrosion inhibitor concentration on the chemical corrosion characteristics of 316L stainless steel were studied by electrochemical experiments.The study found that as the pH value increases,the corrosion current density of stainless steel first decreases and then increases,and the corrosion potential first decreases and then increases and then decreases;with the increase of H₂O₂ concentration,TAZ concentration and BTA concentration,the corrosion current density of stainless steel shows a decreasing trend,and the corrosion potential shows an increasing trend;with the increase of glycine concentration,oxalic acid concentration and citric acid concentration,the corrosion current density of stainless steel first increases and then decreases,and the corrosion potential first decreases and then increases.The pH value affects the anode and cathode reactions of stainless steel,and the other parameters mainly affect the anode reaction of stainless steel.The above parameters affect the chemical corrosion characteristics of stainless steel in the polishing solution,thereby affecting its polishing effect.The structures of TAZ and BTA were characterized by infrared spectroscopy experiments,and it was found that both have functional groups containing N atoms and have better corrosion inhibition performance.The influence of pH value,H₂O₂ concentration,complexing agent concentration and corrosion inhibitor concentration on the wettability of 316L stainless steel was studied through contact angle experiments.Studies have shown that as the pH value increases,the contact angle of stainless steel first decreases,then increases and then decreases;with the increase of H₂O₂ concentration,TAZ concentration and BTA concentration,the contact angle of stainless steel continues to increase;with the increase of glycine concentration,oxalic acid concentration and citric acid concentration,the contact angle of stainless steel first decreases and then increases.These parameters all affect the wettability of stainless steel in the polishing solution,thereby affecting its corrosion resistance and polishing effect.The surface composition of 316L stainless steel was studied by X-ray photoelectron spectroscopy(XPS)experiments.It was found that glycine promoted the production of Fe²⁺and the Fenton reaction,and some of the resulting complexes were adsorbed on the surface of the stainless steel;TAZ was able to film formation on the surface of stainless steel plays a role in corrosion inhibition,thus verifying the accuracy of the previous experimental theory.Finally,a chemical mechanical polishing model of 316L stainless steel was established,and its processing mechanism was analyzed.