| As the application value of acetone gas concentration detection in industrial production,animal husbandry,medical detection and other fields is continuously explored,the demand for acetone gas sensors in various industries is increasing.The acetone sensor with stable work and excellent properties can not only improve production efficiency,but also ensure the safety of the working environment.It also plays an increasingly important role in human health detection.Based on the research of the existing acetone gas sensor,the electrode was prepared by ultraviolet lithography process,and the polymer 3-hexyl-substituted polythiophene(Poly(3-hexylthiophene-2,5-diyl),P3HT)was selected as the gas-sensitive material.The coating process coats the gas-sensitive film,and prepares a resistive sensor that can detect the concentration of acetone gas at room temperature,with a larger reaction area.COMSOL Multiphysics finite element analysis software was used to simulate and analyze the two structures of interdigital electrode and plate electrode.The simulation results show that when the electrode size is close and the filling material is the same,the current density modes of the interdigital electrode and the plate electrode are at the same magnitude,and there is no significant difference.Considering the complexity of the preparation process,the uniformity of polymer filling and other factors,the interdigital electrode structure is selected to prepare the serial gas sensor.L-edit software was used to draw the electrode structure,electron beam thermal evaporation,ultraviolet lithography,metal silver corrosion and other processes were used to prepare interdigital electrodes with a thickness of 200 nm,a period of 32μm,and a number of interdigital pairs of 125.The polymer P3 HT was used as the sensor gas-sensitive material.The P3 HT solution was spin-coated on the interdigital part of the electrode and annealed at high temperature to form a film to prepare an acetone gas sensor.The film thickness is 1±0.4μm.After annealing,the film surface has scattered protrusions,which increases the surface area to volume ratio and provides more binding sites that conducive to the adsorption of acetone gas.The keithley2440 source meter and PC-side data acquisition software were used to test and analyze the response characteristics of the sensor to different concentrations of acetone gas.The lower detection limit of the sensor is 200 ppm,and its response in the concentration range of 200-1000 ppm has a good linear relationship with the gas concentration,and the response of the sensor tends to be saturated above the concentration of 1000ppm. |