Design Of The Circuit System For Measuring The Two-dimensional Motion Accuracy Of Ultra-precision Machine Tools

The two-dimensional motion accuracy measurement of ultra-precision machine tools is of great significance to the accuracy performance evaluation and optimization design of the machine tool.The step-by-step measurement of a single machine axis based on the laser interferometer cannot accurately reflect the two-dimensional motion accuracy of ultraprecision machine tools.In this paper,aiming at the problem of accurate measurement of two-dimensional motion accuracy of ultra-precision machine tools,a set of two-dimensional motion accuracy measurement circuit system is designed in combination with twodimensional motion accuracy laser interferometric simultaneous metrology.The main research contents are as follows:(1)Aiming at the dynamic signal characteristics of laser interference two-dimensional motion accuracy measurement,a signal processing circuit that takes into account both speed and precision is designed.Based on the frequency characteristics and the noise suppression level of the circuit,the circuit device selection and parameter design are carried out,and the characteristic verification is obtained through circuit simulation.(2)Aiming at the influence of the synchronicity of the two-dimensional motion interferometry on the two-dimensional positioning accuracy,a digital circuit based on FPGA combined with a synchronous analog-to-digital converter is designed to realize twodimensional motion interference signal counting and phase data synchronous acquisition,which realizes the synchronous measurement of two-dimensional motion position positioning.At the same time,the Wi-Fi module is used to realize the wireless transmission of two-dimensional positioning metrology data.(3)A data acquisition and analysis software system is developed based on QT and FPGA lower computer,which realizes the functions of Lissajous circle display,position data display,data processing and analysis in two-dimensional motion.(4)An experimental platform is built to verify that the system has good stability and measurement accuracy.