| Zinc Oxide(ZnO),a nanomaterial,has attracted the attention of many researchers due to its rich and unique optical and electrical properties and now is gradually replacing ITO,Ga N,and other popular nanomaterials.It has been found that the inherent defects of ZnO(oxygen vacancies,zinc gaps,etc.)can be improved by doping,compounding,and modifying.And the n-type ZnO can be transformed into p-type ZnO to improve its optical,electrical,and other properties.To this end,several researchers have prepared ZnO nanomaterials compounded,doped,and modified with different elements(metals,nonmetals,oxides,etc.)using different experimental methods such as magnetron sputtering,hydrothermal method,sol-gel method,and so on.However,less research has been done on preparing silver doped Zinc Oxide nanofilm(AZO NFm)by two-step Magnetron sputtering/Magnetron sputtering(MS/MS).Firstly,in this paper,AZO NFms were prepared by MS/MS.We investigated the effects of different sputtering power(p)and sputtering time(t)on the materials'surface morphology,growth mechanisms,and microstructures.The electrical and linear/nonlinear optical properties of AZO NFm were also conducted in this paper.The results show that different experimental parameters greatly influenced the surface morphology,growth mechanisms,and optoelectronic properties.For example,all the AZO NFms were composed of columnar crystals with the accumulations of particles,but the sizes of the columnar crystals were significantly different.The samples show good c-axis selective growth,and the Ag complexes did not change the structures of ZnO NFms but affected the(110)peaks of ZnO NFms.Most of the Ag in the AZO NFms existed as AgxOycompounds,but the content of Ag elements changed significantly,etc.Secondly,we investigated the growth mechanisms and electrical properties of AZO NFms.Due to the influences of the ES barrier and other factors,the growth of Ag on the surface of ZnO nanofilms was firstly nucleated by ZnO and then nucleated by Ag itself.The samples showed n-type conductivity when the sputtering time was short(AZO-50s NFm),or the sputtering power was high(AZO-9w NFm),and the other samples showed p-type conductivities.The other samples were all p-type conductivities.Finally,we analyzed the linear optical properties of all AZO NFms and the nonlinear optical properties of AZO NFms with different sputtering powers.All AZO NFms showed absorption peaks at 367 nm due to the excitonic absorption of ZnO.Except for the AZO-9w NFm sample,all the samples showed different degrees of redshift compared to the ZnO NFms'absorption edges.At the same time,the intensity of the absorption peaks of all samples showed different degrees of changes compared with ZnO NFms,and the forbidden bandwidths were significantly reduced.The nonlinear absorption coefficients?of ZnO NFms and AZO NFms with different powers were calculated to be 3.373×10-8cm/GW,9.622×10-9cm/GW,5.272×10-9cm/GW,2.149×10-9cm/GW,7.170×10-9cm/GW,respectively.The nonlinear absorption coefficient of AZO NFms was on the order of 10-9cm/GW,which was one order of magnitude lower than that of ZnO NFms. |
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