Gas-control Growth And Characterization Of Monolayer Molybdenum Disulfide

Behind the development of integrated circuits to today ’s glorious era,Moore’ s Law,which has guided the development prospects of the industry for years,has gradually gone to a dilemma.As the transistor size and thickness is more and more smaller,the silicon material itself approaches its physical limit.So scientists are eager to solve this problem by introducing new materials into Integrated Circuit Industry,including two-dimensional materials.Molybdenum disulfide has attracted much attention for its special properties,and the large-scale use of molybdenum disulfide requires an in-depth study of the preparation methods.Based on the basis of the existing work,the author proposed the idea of accurately controlling the growth of molybdenum sulfide with gas,and designed a supporting process.Various characterization methods are used to study the obtained samples The main works in this thesis are listed as follows:The first chapter briefly introduces the needs of the study of 2D materials,the special properties of molybdenum disulfide,several methods for preparing molybdenum disulfide,and summarizes the application direction of molybdenum disulfide.The second chapter is the use of oxygen as the growth of molybdenum disulfide.Firstly,the growth principle of using oxygen as a gas carrier to control monolayer molybdenum sulfide is described.Secondly,combined with the growth principle,the corresponding growth device is designed,and combined with the growth device,to detail the pre-growth preparation and the whole growth process.The grain size of the sample,the surface morphology and the optical properties and homogeneity by the PL and Raman spectrometers in the integrated optical platform.The third chapter is the use of water vapor as the growth of molybdenum disulfide.First,the growth principle of using water vapor as a gas carrier to control the single layer of molybdenum disulfide is described.Secondly,combined with the growth principle,the corresponding growth device is designed,and combined with the growth device,to detail the pre-growth preparation and the whole growth process.The grain size of the sample,the surface morphology and the optical properties and homogeneity by the PL and Raman spectrometers in the integrated optical platform.Chapter 4 is some summary of the full text and makes some extended prospects to the following experiments in the paper.