Design And Fabrication Of A Flexible MEMS Velocimeter Imitating The Lateral Organ Of Fish

Traditional flow sensor sensing method,such as hot wire anemometer(HWA),turbine flowmeter,acoustic doppler velocimeter is common and particle image velocimetry large volume,low sensitivity,set up complicated and need an external power,these reasons lead to the flow sensor of underwater navigation application restricted,the increase of the volume of weight will increase the energy loss of aircraft,and long time work underwater aircraft energy supplement and restrictive,in order to solve these problems,used to replace the traditional flow velocity and smaller size,lower power consumption meter get rapid development of MEMS.Through the cave fish organs of bionics research,based on the research situation on MEMS velocity meter at home and abroad,this paper puts forward through the skin outside the thickness of the laser etching and deposition process is made 38 um,the maximum area is 1 square centimeter,beam breadth of 100 ~ 150 um MEMS flexible naked hair sensors,in view of the PVDF material from top to bottom electrode pattern processing method,proposes a more simple and convenient outside laser technology solutions,has a good appearance characteristics of MEMS device structure proves that the reliability of the scheme.Firstly,this paper introduces the research progress of current meters with different mechanisms at home and abroad,and puts forward the idea of replacing the rigid materials of piezoelectric ceramics as the sensitive unit by the flexible characteristics of PVDF material and the piezoelectric properties which are several times higher than piezoelectric ceramics.Then,through the analysis of the structure and mechanical properties of the ciliary and beam,the details of the MEMS bare hair sensor were determined,and the mechanical behavior analysis and finite element simulation of the contact process between the single sensor unit and the fluid with velocity were carried out,and the variation trend of the single sensor unit and the velocity was obtained.Through the structure design and processing scheme design of the flexible MEMS velocity sensor,a set of unique process process is developed under the combination of a variety of processes.Scanning electron microscope shows the edge of the beam body clearly,the structure is complete,and the overall morphology is relatively ideal.Finally,the prototype of the flexible piezoelectric sensor is tested and its underwater velocity measurement ability is verified.