| Micro-operating systems refer to the precision operating system,which are applied to micro-nano operation,and the compliant micro-positioning clamping system is a typical microoperating system.With the deepening development of the scientific research and engineering applications,the existing micro-positioning clamping systems are unable to meet the needs of precise positioning in micro-nano operation,and meanwhile,their working space is limited and operating accuracy is low.With this background,the design idea of combining micro-gripper and micro-positioning platform into multi-DOF compliant micro-positioning clamping system is proposed.The micro-gripper can be used as the executive mechanism of the system,and the micro-positioning platform can drive the micro-gripper to achieve precise positioning with large stroke and multi-DOF.This paper focuses on the static and dynamic characteristics of the micro-gripper and micro-positioning platform,and the main contents are as follows:(1)Firstly,the design idea of combining single DOF micro-gripper with multi-DOF compliant micro-positioning platform was determined,and the structural design objective of compliant micro-positioning clamping system was defined.Secondly,the structural design methods of micro-gripper and micro-positioning platform were introduced,and the advantages and disadvantages of each design method were compared.Finally,the structural design route of multi-DOF compliant micro-positioning clamping system was determined,and the structures of micro-gripper and micro-positioning platform were proposed.(2)In order to solve the problems of the difficulty in realizing parallel output and the limited output displacement and at the end of micro-gripper,a single DOF micro-gripper was designed.Secondly,the theoretical models of amplification ratio,input stiffness and natural frequency of micro-gripper were deduced based on the pseudo-rigid body model method.Then,the effects of structural parameters on amplification ratio and natural frequency were discussed,and the optimization model of micro-gripper was established.Finally,the theoretical model was verified by finite element analysis,and the parallel output performance of micro-gripper was simulated and analyzed.Simulation results show that the amplification ratio is 16.82,and the output coupling error rate is only 0.36% in the condition of the effective input displacement of10um.(3)In order to drive the micro-gripper in micro-positioning clamping system to realize precise position positioning on the plane,a two translation compliant micro-positioning platform was proposed.Then,the theoretical models of micro-positioning platform were deduced based on the linear elastic beam model,and the parameters of micro-positioning platform were optimized.Finally,the theoretical models were verified by finite element analysis,and the coupling displacement of micro-positioning platform was simulated and analyzed.The results show that the micro-positioning platform is completely decoupled,and the theoretical workspace of two DOF plane compliant micro-positioning clamping system is [-1174.9um,1174.9um] in x axis and [-996.1um,996.1um] in y axis.(4)In order to drive the micro-gripper in micro-positioning clamping system to realize precise position positioning in space,a three translation compliant micro-positioning platform was proposed.Then,the static and dynamic theoretical models of platform were deduced respectively based on the nonlinear model method and the linear elastic beam model method,and the parameters of platform were optimized based on the derived theoretical models.Finally,the theoretical models were verified by finite element analysis,and the coupling displacement of micro-positioning platform was simulated and analyzed.The results show that the micropositioning platform is completely decoupled,and the theoretical workspace of three DOF space compliant micro-positioning clamping system is [-1171.8um,1171.8um] in x axis,[-993.0um,993.0um] in y axis and [0um,997.9um] in z axis.(5)Taking the three DOF space compliant micro-positioning clamping as an example,the prototypes of single DOF micro-gripper and three translation compliant micro-positioning platform were fabricated.The experimental platform was established,and the precision positioning capability of micro-positioning clamping system was analyzed based on the experimental results.The experimental results show that the theoretical models of amplification ratio for micro-gripper and lost motion for micro-positioning platform are completely correct,and three DOF space compliant micro-positioning clamping own the ability to achieve precise position positioning in space. |
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