Measurement Of MEMS In-plane Oscillation Based On The Stroboscopic Micro-vision System

With the development of MEMS,there are increasing needs for dynamic tests of MEMS home and abroad.As the complexity of MEMS gets higher,its structure also gets refined and resonant frequency gets higher.At present,LDV with a welder range of applications is one of the best choices to measure out-of-plane frequency of MEMS and its micro-interference system could measure its surface.For achieving dynamic features in in-plane oscillation,this research design combined SMVS and SURF,and promoted the measurement accuracy by analyzing the data and results.This paper mainly concludes:1.The strobe Micro-vision system based on FPGA was built,including FPGA frequency flash source,image acquisition system and synchronous control system.The parameters of each device are analyzed and its performance is demonstrated.The parameters of the stroboscopic pulse are analyzed to obtain clear stroboscopic image and avoid aliasing effect.FPGA logic output synchronizes the frequency flash source and CMOS industrial camera to continuously collect the strobe image with the same phase interval.The experiment verifies the light pulse performance of the frequency flash source,which meets the need of collecting the frequency flash image clearly,and the experiment verifies the ability of collecting the frequency flash image clearly.2.A feature point matching measurement method based on SURF algorithm was proposed to achieve high-precision in-plane dynamic characteristic measurement.The method is using stroboscopic frequency acquisition MEMS micro vision system cycle mail like sequence,on the basis of using SURF algorithm for sequence of adjacent image feature point detection and matching,and then through the RANSAC algorithm to remove false matching,through CUDA GPU acceleration,can quickly obtain the stable in-plane displacement of subpixel precision measurements.3.Through the statistical analysis of the result of feature matching,the gross errors that may be contained in it are further eliminated,and the subpixel displacement of the target to be measured is calculated according to the final measurement result,which is then converted into the actual spatial distance.Through simulation verification,the experimental results of standard measurement show that the maximum measurement frequency of the system for in-plane vibration can reach 500 KHz,and the in plane motion measurement error can be less than 15 nm,which can achieve the requirements of fast and high-precision detection.Finally,the motion parameters of the MEMS vibratory gyroscope with frequency of 8.189 KHz and amplitude of 4.5 μm can be reduced.