Curved Surface Modulation Of Microstructures By Fast Tool Servo Technique And The Related Processing Experiments

Microstructure surface is a special surface of parts,which is widely used in optical system,mechatronics,aerospace,national defense industry and other fields.Its surface shape accuracy can reach the micro nano level with unique properties,such as friction,adhesion,wear resistance,lubrication and so on.With the trend of integration,miniaturization and functionalization of all kinds of manufacturing systems in the future,the market demand and development prospect of parts with specific microstructure surface are very broad,especially the application of curved surface modulated microstructure in high-performance optical system has high research value.This paper mainly focuses on the machining process and experiment of curved surface modulated sinusoidal mesh micro structure surface with new application by using ultra precision turning machine tool combined with fast tool servo(FTS)processing system,in order to achieve the goal of surface modulated micro structure with high morphology accuracy and high surface quality by using B-axis rotary machining.Firstly,aiming at the new application of curved surface modulated sinusoidal grid surface machining,this paper focuses on tool path generation and tool tip arc radius compensation algorithm of FTS machining.In view of the particularity of curved surface modulated sinusoidal grid surface in FTS machining,firstly,the shape of surface should be designed,and the ideal tool path of FTS machining should be obtained by surface shape discretization.Compared with the offset point method,one-way tool method and offset curve method,and the tool tip arc radius segmentation method is innovated to compensate the tool tip arc radius to realize the tool path planning of FTS machining.The diamond tool is designed and optimized to meet the requirements of curved surface modulated sinusoidal grid machining,and its manufacturing and testing are completed.In this paper,the design and construction of FTS system suitable for the surface processing of sinusoidal grid with curved surface modulation are carried out,and the working stroke,closed-loop linearity,repeated positioning accuracy,closed-loop resolution,no-load resonant frequency,closed-loop bandwidth and frequency characteristics of the fast tool positioning table are measured,to ensure that the system performance of FTS device can meet the requirements of machining.The verification and debugging experiments of ultra precision four axis machine tool and FTS system are carried out.The plane sinusoidal grid processing experiment and the traditional curved surface modulation sinusoidal grid processing experiment are carried out respectively.By detecting the machined surface with white light,the influence of the performance of FTS system on the quality of the machined surface is analyzed.Aiming at the defects of the sinusoidal grid surface,the corresponding solutions are proposed.Experiments show that FTS system and the ultra precision four axis lathe,which can be used for the subsequent surface modulation microstructure processing experiments.Finally,under the condition of ensuring the good performance of ultra precision four axis lathe and FTS system,the machining process optimization experiment of curved surface modulation microstructure is carried out by using the machining path generation method proposed in Chapter 2,and the influence of the tool setting on the microstructure surface is analyzed,and the trial cutting method is used to make the tool approach the theoretical center point as much as possible.The influence of processing parameters on microstructure surface is analyzed,and the influence of feed per revolution and sampling points on surface quality is explored.The influence of cutting depth and curvature radius on the surface quality of microstructure is investigated by experimental method.The optimized parameters are used to carry out the experiment of B-axis rotary machining curved surface modulated sinusoidal grid FTS turning.The white light interferometer is used to detect the three-dimensional morphology and surface roughness of the machined surface,and evaluate the quality of the machined surface,so as to ensure that the curved surface modulated sinusoidal grid structure with high surface shape accuracy and good surface quality can be machined.