| With the popularization of the practical application of optics in various fields,optical components are more and more widely used,and grating,as a common component,is gradually valued by people.Compared with the traditional birefringent crystal,grating has the advantages of small volume,easy integration,low price and so on,so it has attracted people’s attention,and more research on its characteristics has been carried out.The purpose of this paper is to process V-groove on the metal surface,and to process sub wavelength grating structure on the side wall of V-groove.Metal structure coloring is also gradually applied to anti-counterfeiting,information storage and other fields because of its long storage time and difficult to copy.There are two kinds of metal surface coloring methods: non machining method and machining method.The principles of non machining methods can be roughly divided into element transfer and energy transfer.Non machining methods generally have the disadvantages of poor process controllability,uneven coloring,high environmental requirements and high cost.There are many existing machining methods,such as AFM based engraving,elliptical vibration cutting,grating based engraving and micro machining device based on probe trajectory motion.However,some of these methods can not achieve large-area machining,some of them have low machining efficiency and can not achieve efficient machining,Compared with the traditional high-frequency machining method of fast knife self-excited vibration machining,the application of two-dimensional shear piezoelectric ceramics can greatly save the cost,and expand the processing range by adjusting the motion stroke of the translation table.Therefore,this paper mainly studies the process of two-dimensional shear piezoelectric ceramics driving tool to process sub wavelength grating,in order to improve the processing frequency as much as possible,Furthermore,compared with other existing methods,the grating processing is more efficient,in order to achieve the purpose of low-cost and high-efficiency processing of micro nano structure.Firstly,a micro structure processing device based on two-dimensional shear piezoelectric ceramics is designed,which can control the tip to do spiral motion and achieve high processing frequency;In this paper,the characteristics of two-dimensional shear piezoelectric ceramics are studied theoretically,the influence factors of its vibration amplitude are explored,and its vibration amplitude under different input parameters is calibrated,which provides application parameters for subsequent simulation and processing.Secondly,the processing principle of the processing device is studied,the tool path is simulated,and the influence of different processing methods and process parameters on the parameters of the grating structure is analyzed.Then,the model is established by using the finite difference time domain method,and the optical simulation analysis of the structure is carried out by using FDTD solutions to analyze the spectral and diffraction efficiency of the grating,And the diffraction of grating equation is calculated theoretically,which provides guidance for the later practical processing.Finally,on the basis of calculation and simulation analysis,the actual processing of grating structure is carried out,the surface quality under different process parameters is analyzed and compared,and the diffraction situation is observed to explore the influence of different processing methods and process parameters on the color response of grating.In the experiment,the processing frequency is gradually increased to explore the surface quality of grating under different frequencies,Finally,under a large number of experiments and analysis,the processing frequency that can meet the requirements and the grating surface quality is better is selected,and the specific processing parameters are determined according to the required color requirements,and the program is written to complete the processing of complex patterns. |
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