Research On Control System Of Three-axis Precision Aerostatic Bearing Stage

With the industrial upgrading of China’s manufacturing industry,the advanced manufacturing industry is developing in the direction of high speed,high efficiency and high precision,and the performance requirements of advanced manufacturing equipment and measurement equipment are also getting higher and higher.With the advantages of frictionless,high precision and easy to achieve high-speed movement,precision aerostatic bearing stages are gradually applied in high-tech fields such as semiconductor inspection,laser processing and precision measurement,and the control system of three-axis precision aerostatic bearing stage has a very critical role in the high-speed and high-precision movement and positioning of the platform.The content is as follows.（1）According to the structural characteristics of the aerostatic bearing stage and the needs of application in precision measurement and processing occasions,the software and hardware platform of the control system is designed.The control system hardware is configured,the electronic control circuit is designed,and the software with functions such as status display,motion control,measurement and running G code is designed in modules.（2）The mathematical model of the aerostatic bearing stage is established and the appropriate control algorithm is designed,and the effectiveness of the control algorithm is simulated and analyzed.The X and Z axis kinematic models are established,and the speed and acceleration compound feedforward control algorithm is designed.The simulation shows that the algorithm can effectively reduce the tracking error;the Y axis dynamics model is established,and the PID cross-coupling control algorithm is designed.The simulation shows that The algorithm can significantly reduce the synchronization error.（3）The control algorithm is experimentally researched,and the results show that the designed control algorithm can effectively improve the three-axis control performance.Compared with the traditional three-loop control,the X,Z axis adopts the speed and acceleration compound feedforward control algorithm,which improves the tracking accuracy,and the Y axis adopts the PID cross-coupling control algorithm,which reduces the synchronization error compared with the parallel control.（4）The performance of the stage was tested,and precision measurement and processing experiments were carried out.The straightness and flatness errors of the stage are tested,the three-dimensional surface shape of the compound eye microstructure array is measured,and the scraping and milling processing experiments are carried out.The experimental results show that the developed control system can meet the requirements of the aerostatic bearing stage in the field of precision measurement and processing need.