MEMS Micromirror Measurement And Control Platform Construction And Nonlinear Compensation

Micro-Electro-Mechanical-Systems(MEMS)is a kind of micro systems or micro components which can be produced on a large scale with nano-processing technology and consist of microstructure,micro sensor,micro actuator and signal-processing and control circuits,interface circuits,communication modules,etc.MEMS micromirror is a typical representative of those components.MEMS micromirror is widely used in the area of non-destructive detection such as food detection,optical medical detection with the advantages of small size,low weight,low energy consumption,high sensitivity and so on.However,MEMS micromirror is a highly underdamped system,and it must be with good performance when applied in those areas.In the thesis,a testing and control platform of micromirror is built;the data of the platform are acquired to analyze the micromirror system and compensate its performance.The following researches are done in the article:(1)The designing and building of the platform of micromirror: In order to improve the scanning accuracy of micromirror in the application,the system characteristic of micromirror needs deep-going study and the control algorithm based on the model should be designed.Thus,the modules such as MEMS driving circuit and signal amplification circuit are designed and a testing and control platform of micromirror is built,which lay a foundation for system identification and control of MEMS micromirror.(2)The modeling method of micromirror system: In the area of micromirror,there haven't been any research on system identification modeling.In the thesis,Hammerstein model and linear modeling method are used to fit the real system of micromirror to improve the disadvantages of its hysteresis and highly under-damped characteristic.(3)The control method of micromirror system: Based on the inverse model,the PID-cascade linear inverse model control is realized.The internal model-PID control based on linear model,PID-cascade PI inverse model control and PID-cascade Hammerstein inverse model control effectively improve the disadvantages of hysteresis and highly under-damped characteristic of the micromirror.