Research On Basic Performance Of Silicon-based Polymer Planar Optical Waveguide

At present,informatization is a major development trend in the world today,and optical communication is an important technical means for the development of informatization in the world.Therefore,integrated optics has become a hot research topic in the world.As an important research direction of integrated optics,polymer planar optical waveguide devices represent the development of devices towards microintegration and functional integration.In this paper,a passive optical waveguide device was fabricated using polymer SU-8 and methyl methacrylate as the core layer.The absorption characteristics of polymer optical waveguides pumped by different wavelengths of LEDs were demonstrated.The preliminary basic research work was carried out for the Rare Earth doped Waveguide Amplifier(RDWA)pumped by the LED.In addition,theoretical design and experimental preparation and testing of MachZehnder structured optical waveguide sensor were carried out.The main work carried out in this paper is as follows:1.The polymer SU-8 and methylmethacrylate straight waveguides and MachZehnder structure waveguides were prepared.The optical absorption performance of polymer SU-8 and PMMA optical waveguide was demonstrated under excitation of 310 nm,365 nm,405 nm,525 nm LED and 808 nm laser.The experimental results showed that when pumped by blue-violet LED,The attenuation of output optical intensity weakened with the red shift of the center wavelength of LED pump source and the decrease of waveguide size.For the polymer PMMA waveguide,no obvious optical intensity attenuation was observed under the excitation of LEDs.2.The three-dimensional structure of the Mach-Zehnder-type optical waveguide sensor was established using Rsoft software.By changing the device parameters,the Mach-Zehnder structured sensor was simulated through light,the transmission loss of the optical field was compared,and the optimal size of the device with the relatively lowest transmission loss was determined.3.Based on the theoretical design,the Mach-Zehnder structured optical waveguide sensor was fabricated.In the process experiment,the SU-8 3005 photoresist was lithographically explored,and the lithography time and development time of the optical waveguide with a thickness of 5μm were determined;in the second lithography experiment,high-precision photolithography was performed.Engraving exploration;in the reactive ion etching experiment,the etching time of polymethyl methacrylate with a thickness of 2.7 μm was explored.By using the scanning electron microscope characterization,a device with a good morphology and a complete structure could be observed.The sensitivity of the device was 184 dB/RIU After measuring different concentrations of NaCl solution.