Study On Optical System Of Multiaperture Alignment Equipment

The rapid development and progress of optical technology has made various optoelectronic devices more and more integrated,and the application requirements for multi-optical axis systems integrating visible light and lasers are increasing.The design layout of this type of system is more complicated.It is extremely important to ensure the consistency of the optical axis between the subsystems.In this paper,a multi-branch optical measurement system is designed in response to the requirements of the actual engineering project,which is used to detect the optical axis consistency and beam quality of the equipment to be inspected and assist in the installation and adjustment.The main research work is as follows:(1)Investigated the current research status of multi-axis consistency detection methods domestic and abroad,proposed the method to be applied in the design of this paper and the system structure to be selected,clarified the needs of achromatic design,and analyzed and summarized the main research direction of the article.(2)The characteristics and limitations of the expression form of the conventional dispersion model are compared and explained,and then the Buchdahl model with a simple form and faster convergence speed is derived,the solution method of the parameters in the model is introduced in detail,and the fitting accuracy of the refractive index is verified.The chromatic aberration expression is deduced based on the three-order aberration theory,and the connection between the Buchdahl model and the chromatic aberration expression is established,and the expression form of the dispersion vector analysis method is deduced.(3)According to the characteristics of the system and the requirements of the working environment,the structural form of the attenuator system is determined,and the deformation expression of the dispersion vector scale factor suitable for the afocal system is proposed to guide the material replacement in the design process,and the design results that meet the achromatic requirements are obtained.The material selection of the converging system is guided by the dispersion vector relationship that the materials of the two mirrors should meet.The two parts of the system are combined and spliced ? ? and the splitting prism is added to obtain the final three-way structure.Finally,the tolerance analysis is carried out,and it is determined that the system can meet the requirements under reasonable tolerance distribution.According to the design requirements,it can be processed and prepared according to the given tolerance data.(4)Based on the tolerance analysis results as the standard for lens component processing and preparation,the refractive index and surface size of the lens material used are tested,and the measured data are replaced with software for further optimization and adjustment to minimize the impact of refractive index tolerances and component manufacturing tolerances on wavefront image quality.The spatial relative position between the attenuator system and the lens elements of the converging system is determined by the centering adjustment method,and the wavefront image quality of the adjustment result can meet the index requirements.Finally,the position of the light source in the branch of the collimator and the position of the CCD camera in the far-field detection optical path were calibrated by the pentaprism method and the autocollimation method,respectively.The final design of the multi-branch system has an effective aperture of not less than190 mm,including the measurement reference of 632.8nm visible indicator light and1040-1090 nm near-infrared laser.The three optical paths of the system respectively realize near-field spot position measurement,far-field beam quality measurement and parallel Light pipe function.A scientific overall arrangement has been made in the technical process of design,processing and assembly.Finally,through the actual verification of the assembly and adjustment test results,the design of the multi-branch optical measurement system meets the index requirements.