Research On Digital Measurement And Control And Quadrature Compensation Technology Of Quartz Micromachined Gyroscope

Quartz micromachined gyroscopes are a typical Micro-electromechanical Systems(MEMS)inertial device.Compared with traditional gyroscopes,they have the advantages of small size,light weight,low power consumption and low cost.With the continuous development of MEMS technology and various measurement and control methods,the performance of quartz micromachined gyroscopes has been greatly improved,and they are playing an increasingly important role in the civilian and military fields.However,due to the limitations of materials,structures and processing technology,the quartz micromachined gyroscopes have large coupling errors,asymmetric errors,etc,and the performance improvement is restricted.Quartz micromachined gyroscopea are used as the research object in this paper,and on the basis of its analog measurement and control circuit,carries out research on digital measurement and control and quadrature compensation technology.The main research contents are as follows:1.Analyze the working principle of the quartz micromachined gyroscopes.On this basis,the dynamic model and electrical model of the quartz micromachined gyroscope are built,and the models are mathematically analyzed.The electrode distribution and interface circuit of the quartz micromachined gyroscope are introduced,which provides guidance for the design of subsequent subsystems.2.Constructed the overall framework of the quartz micromachined gyros digital measurement and control system,analyzed the principle of the digital closed-loop drive and digital detection of the quartz micromachined gyro,and established a closed-loop drive using digital phase-locked loop(PLL)and automatic gain control(AGC)technology.The digital closed-loop drive model and the open-loop detection model are simulated on the Simulink simulation platform to verify the correctness of the two models.Based on the requirements of the digital measurement and control system,the relevant field-programmable gate array(FPGA)algorithms are implemented;the measurement and control circuit of the quartz micromachined gyroscopes that realizes the digital closed-loop drive and open-loop detection is designed,and the experiment verifies the effectiveness of the digital measurement and control scheme.3.The reason of the quadrature error of the quartz micromachined gyroscopes and they influence on the performance of the gyroscopes are analyzed,and the importance of eliminating the error is pointed out.On the basis of analyzing the common methods of quadrature error correction,a quadrature voltage compensation method suitable for quartz micromachined gyroscope is proposed,and the corresponding quadrature compensation circuit is designed.The frequency domain and time domain simulation of the quadrature compensation loop is carried out to verify the feasibility of quadrature compensation.The quadrature compensation circuit of the quartz micromachined gyroscopes is experimentally tested.The results show that the quadrature voltage compensation method can effectively reduce the quadrature signal of the detection channel and improve the zero bias performance of the gyroscopes.4.Based on the digital closed-loop drive,open-loop detection and closed-loop quadrature compensation of the quartz micromachined gyroscopes,the prototype of the quartz micromachined gyroscopes has been designed.According to the test rules of domestic micromachined gyroscopes,experiments were carried out on the analog circuit without quadrature compensation,the digital circuit without quadrature compensation and the quartz micromachined gyroscopes with digital circuit with quadrature compensation.The results show that the overall performance of the digital circuit is excellent.For analog circuits,the performance of the circuit after quadrature compensation is better than the circuit without quadrature compensation,which proves the feasibility and effectiveness of the digital measurement and control circuit and quadrature compensation technology studied in this paper,and lays a foundation for further research and application.