Research On Processing Quality Of Micro Passive Components Based On Additive Manufacturing

The Internet of things(IOT)is an emerging modern information industry,which can promote the development of science and technology and economy.It is widely used in intelligent transportation,environmental monitoring,intelligent medical care and other fields.With the wide application of the IOT,it has become an increasingly urgent demand to process LC(inductance and capacitance)passive wireless sensors with small size and high performance.The miniaturization and three-dimensional of inductor and capacitor are the key to achieving the small size and high performance of LC passive wireless sensor.In recent years,additive manufacturing technology has been applied to the processing of micro passive components at home and abroad,but the processing quality is uneven.In this paper,the metalized micro passive components(micro spiral inductor and parallel plate capacitor)are processed by injecting EGa In liquid metal into the micro passive component mold of additive manufacturing,and the processing quality is studied.The specific research contents are as follows:In the aspect of the machinability of additive manufacturing technology for micro-passive components,the applicability of processing micro-passive components with FDM technology,DLP technology and SLA technology is analyzed.The results show that the SLA technology has a high success rate and can be applied to the fabrication of micro passive components,which provides the basic guarantee for the final processing quality.In the aspect of the geometric model reconstruction,based on CT tomography images,the geometric model of additive manufacturing micro passive components is reconstructed by using metal artifact removal algorithm and MC algorithm,which lays a high-quality model foundation for processing quality detection(including structural parameter nondestructive measurement and electrical performance characterization).In the aspect of non-destructive measurement of structural parameters of micro passive components,for the structural parameters of micro spiral inductor,based on the extracted central axis of the geometric model of micro spiral inductor,the coil diameter and pitch are measured by least square circle fitting and helix fitting.By extracting the intersection of the segmentation plane and the reconstructed geometric model,the wire radius and roundness error are measured,and the length of the coil along the axis is measured by obtaining the distance between the fitted straight lines.For the structural parameters of the parallel plate capacitance,based on the reconstruction of geometric model,the measurement of plate spacing and plate area is achieved through algorithms such as the axis extraction and rectangle fitting.The measurement results of the structural parameters show that the forming accuracy of the circular channel cross-section of the additive manufacturing micro passive components based on SLA technology is not good,the machining error of the wire diameter is large,but the can be controlled within 20%;and the machining error of other structural parameters can be controlled within 5%,which has high forming accuracy.In the aspect of electrical performance characterization,on the one hand,the electrical performance of micro passive components was tested by impedance analyzer.The results show that the actual electrical performance of additive manufacturing micro passive components is good.On the other hand,HFSS numerical simulation was performed on the reconstructed geometric model of the micro spiral inductor,and the results are compared with the results of theoretical model numerical simulation and physical experiment.The results show that the numerical simulation method based on the reconstructed geometric model is feasible.