| The world has entered the information age nowadays,and numerous fields have shown strong innovation vitality.Many emerging technologies have grown from scratch and stepped into the center from the edge.In high-end areas where countries are fiercely competing,such as smart manufacturing,semiconductors,biotechnology,sensors,space exploration,etc.,piezoelectric actuators are usually regarded as a key technology to provide new ideas and resolutions for various application scenarios.Piezoelectric stacks and flexure hinges are common configurations in piezoelectric actuators.The paper introduces the structure and characteristics of piezoelectric stacks,the characteristic and theoretical calculations of flexure hinges.Meanwhile,the basic principles of the two types of non-resonant actuators of inchworm type and stick-slip type involved in the paper are analyzed to lay the foundation for subsequent research work.Compared with the resonant type,the non-resonant actuators have the advantages of high accuracy and low wear,and effectively avoids the serious nonlinear phenomenon of the output performance int the resonant mode which brings excellent controllability.However,there are still much shortcomings in practical applications that need to be studied and resolved by scholars.In order to provide some ideas and suggestions to solve the shortcomings,the paper proposed two new actuators based on the research of the motion mechanism of actuators,which are named as dual-diamond shape inchworm actuator and “M” shape stick-slip actuator.The inchworm type is based on the principle of classic inchworm actuator.In an effort to solve the disadvantages of complex structure and difficult control of the traditional inchworm actuators,the new actuator reduces the piezoelectric elements from more than three to only two,which improves utilization rate of the ceramic stacks,and this is also benefit to the miniaturization of the structure.The “M” shape stick-slip is a new type of bidirectional stick-slip piezoelectric actuator based on the principle of the stick-slip and it’s a combination of asymmetric structure and flexure hinges design.This paper discusses the effect of the inclined beam structure on the parasitic displacement of the stick-slip actuator,and conducts theoretical analysis and simulation verification to verify the feasibility of the actuator.ANSYS is a commonly used simulation software for research piezoelectric actuators.As a general-purpose software,its research efficiency for some special structures is relatively low,and the APDL language,which is born out of FORTRAN,is also difficult to learn.In order to improve the simulation efficiency of the piezoelectric transducer,this paper uses C++ as the programming language and QT 5.12 as the development software on the basis of the standard ANSYS to carry out secondary development.The software platform has a built-in model mode that interacts with ANSYS background and a support mode of real-time interaction,which provides a more concise human-computer interaction interface and reduce the workload of the simulation process.After the simulation and optimization of the secondary development platform software,the two type actuators were designed and manufactured,and the experiment system was well prepared.The experimental results show that the two actuators can realize the drive function of the linear guide as expected,the maximum speed of the inchworm actuator and stick-slip actuator is 6715.65μm/s and 2160.66μm/s,respectively,which verifies the correctness of the theoretical design and achieve the design goal. |