| The birth of micro-electro-mechanical system(MEMS)drives the rapid development of miniaturized sensors.With the increase of market demand for inertial measurement,the research on MEMS accelerometer is becoming more mature.Accelerometer can be used in civilian fields and military fields,such as navigation and positioning,unmanned driving,smart bracelet,missile guidance,gun sight radar and so on,has a broad application prospect.Due to the Micro-optical-electro-mechanical-system(MOEMS)accelerometer has the characteristics of high sensitivity,high resolution and anti-electromagnetic interference,a double-layer grating accelerometer based on Talbot effect detection is proposed in this paper.Firstly,we describe the working principle and structure of double-layer grating accelerometer.Through structural simulation and double grating simulation by Ansys and Comsol software,we investigate the influence of cross-axis interference on the performance of double-layer grating accelerometer,and a kind of anti cross-axis interference accelerometer structure is proposed.Secondly,we completed the process flow and mask layout design of grating accelerometer,studied the high precision micron grating preparation,high aspect ratio beam etching and high quality back release key processes in the fabrication of accelerometer device through a large number of theoretical analysis and preliminary experiments,then the device was fabricated by photolithography,deep silicon etching and bonding techniques,and the accelerometer prototype was manufactured.Finally,we test the sensitivity,resolution and bias stability of the grating accelerometer.The experimental results indicate that this MOEMS accelerometer with the proposed design can achieve the sensitivity of 3.328 V/g,the resolution of 0.4 mg and a bias stability of 0.3 mg.The comprehensive performance is good,which verifies the feasibility and superiority of transmission grating accelerometer scheme. |
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