| In response to the current demand for angle measurement in various research fields,this paper uses MEMS technology to design and manufacture a single-chip integrated magnetoelectric angle sensor based on magnetic sensing devices.The sensor uses an integrated silicon magnetic sensing device(silicon magnetic sensitive transistor)as the detection unit.Among them,silicon magnetic sensitive devices placed in opposite directions form x and y direction magnetic sensitive units,which can achieve the measurement of external magnetic field components B_xand B_yin the x and y directions.When the external magnetic field B rotates in the two-dimensional plane,B_xand B_ychange,which affects the output voltage of the two magnetic sensitive units of the sensor.By analyzing the changes in the output voltage value,the measurement of the rotation angle of B within the 360°range can be achieved.Software TCAD-Atlas and TCAD-Athena are used to construct structural simulation models and process simulation models for magnetic sensing devices and angle sensor chip models.Then the simulation analysis of sensor characteristics is conducted.The sensor chip layout is drawn using L-Edit software,the angle sensor chip manufacturing process is designed based on MEMS technology,and the chip is packaged without magnetization.The characteristics of the magnetoelectric angle sensor are measured using a testing system.At room temperature,the magnetic sensitivities of the magnetic sensitive units in the x and y directions of the sensor are 111.7 V/m T and 118.9 V/m T,respectively.When the constant magnetic field B rotates within the range of 0°～360°,the output voltage of the magnetic sensing unit in the x and y directions shows cosine and sine curve trends,respectively,indicating that the angle sensor chip can measure the angle of the planar magnetic field,laying the foundation for further optimizing the sensor structure and characteristics. |
