Design And Fabrication Of MEMS Micro-hotplate For Gas Sensor

As upgrading of industrial production,constructing of smart city and human’s quest for a better life,various kind of gas sensors has applied in various applications,detecting target gases.With the development of MEMS technologies,research regarding MEMS gas sensor has emerged recently,MEMS gas sensor was widely discussed due to its performance in downsizing,low energy consumption and potential in mass production.The issue about array design and mass production procedure become urgent tasks to be conducted.In this work,research concerning main component of MEMS gas sensor-MEMS Micro-hotplate was conducted:Tiny MEMS Micro-hotplate was designed,the dimension is 1 mm*1 mm*0.4 mm,11 different design of MEMS micro hotplate was proposed,those designs were different in structure design and material,and device array combined with 7 different designs was proposed.Finite element analysis was performed to figure out thermotic and mechanic characteristic of MEMS micro hotplate designs,peak temperature of 375 ℃ and 604 ℃ was acquired when MEMS micro hotplate with standard design and smaller design driven by 30 m W power,two new evaluate criterions of thermal performance was proposed,and applicating suggestion was given according to characteristic of different designs.Fabrication procedure of device was designed and verified,and parameters in each process was confirmed,MEMS micro hotplate was fabricated in accordance with design.The performance of MEMS micro hotplate was characterized by semiconductor device analyzer,standard design reached 349.78 ℃ with a power consumption of 30 m W,the test data has verified the conclusions about thermal performance of different designs made in FEA process.MEMS micro hotplate remain structural and electrical stable after 20-603 ℃ cycle test,shows great mechanic performance.