Study On Temperature Sensing Characteristics Based On Series Microring Resonator

In recent years,photonic devices are gradually developing towards miniaturization and integration.As a simple multifunctional micro-optical device,micro-ring resonator can be widely used in temperature,humidity,refractive index and other sensing fields due to its high quality factor,narrow bandwidth,small size and high integration.In this thesis,a new type of micro-ring resonator is designed by changing the material and structure of the micro-ring,and the output spectral and temperature sensing characteristics of the micro-ring resonator are studied.In this thesis,the model of micro-ring resonator is established by using coupled mode theory and transfer matrix method,and the simulation is carried out by using COMSOL and MATLAB tools.The main work includes:（1）A series double-ring microring resonator based on diamond material with multilayer ridge waveguide is designed.The diamond material is used as the core layer of the structure,namely As₂S₃-Si O₂-diamond-Si O₂-As₂S₃.The structure model is established and the transmission characteristics of the designed structure are analyzed.The influence of the coupling coefficient and the radius of the ring waveguide on the output spectrum is discussed,which provides a theoretical basis for the design and application of new micro-ring resonators.（2）On the basis of series double-ring structure,a series double-ring cascade micro-ring resonator based on cursor effect is designed.The output function of the structure is calculated by the transfer matrix method.The field strength distribution and the transmission process of the designed device are simulated,and the transmission characteristics are analyzed.The performance enhancement principle of the device is introduced.（3）Analyse the sensing characteristics of series double-ring cascade micro-ring resonator used for temperature measurement,and study the temperature sensing characteristics of the local and overall parts of the structure as sensor units.Finally,the sensor performance index of the cascade structure is calculated,and the sensor performance of the cascade structure is better than that of the cascade structure.This thesis proves that improving the structure parameters of micro-ring resonator can effectively improve the device performance through theoretical research and simulation experiments of micro-ring resonator.Series double-ring cascade micro-ring resonator can avoid bending loss caused by ring waveguide radius to a certain extent,and has a larger free spectral range.It provides a new idea and reference for the design of a large range and high sensitivity micro-ring sensor.