Research On High-resolution Magnetic Field Measurement Of Millimeter Wave Chip Based On NV Color Center

In recent years,the integrated circuit industry has developed rapidly and has become a key area of global technological competition.With the increase in integration,the development of 3D packaging technology and the increase in operating frequency have also put forward new requirements for chip testing technology.Quantum precision measurement technology uses the manipulation of quantum states to achieve high-precision and high-sensitivity measurement of physical quantities.Diamond NV(NitrogenVacancy)centers,as a high-performance room-temperature quantum magnetic sensor,have attracted wide attention in the academic community since the realization of single NV center optical detection of magnetic resonance.The diamond NV center is a type of luminescent defect in diamond,which has a long spin coherence time and high fluorescence brightness at room temperature.Based on its excellent quantum properties,this thesis designs a millimeter-wave chip measurement system based on fiber-coupled diamond NV centers.In this system,a micrometer-sized diamond NV center on a conical fiber is used for high-resolution magnetic field measurement.The combination of confocal optical path and software control realizes the initialization,manipulation,and readout of quantum states.This thesis uses quantum state pulse subcarrier modulation to improve the system’s signal-to-noise ratio.A diamond NV axis positioning method is designed to find the crystal axis direction in the NV ensemble,and the resonance peak frequency is linearly tuned from low frequency to millimeter-wave frequency by applying an external magnetic field.Then,the system is scanned and verified,and vector microwave field imaging of different frequency points of the coplanar waveguide is performed,and the microwave magnetic field of the antenna is simulated,and the simulation results are consistent with the scanning results.This system can achieve weak disturbance,high resolution,and wide-band microwave field imaging,and can be applied to various stages of chip testing,such as chip functional verification,chip failure analysis,and other fields,promoting the development of chips.